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AssigneesApplied Thin Films, Inc., UT-Battelle, LLC
InventorsSambasivan Sankar, Amit Goyal, Scott A. Barnett, Ilwon Kim, Donald M. Kroeger
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The present invention relates to epitaxial, electrically conducting and mechanically robust, cubic nitride buffer layers deposited epitaxially on biaxially textured substrates such as metal and alloys. The invention comprises of a biaxially textured substrate with epitaxial layers of nitrides. The invention also discloses a method to form such epitaxial layers using a high rate deposition method as well as without the use of forming gases. The invention further comprises epitaxial layers of oxides on the biaxially textured nitride layers. In some embodiments the article further comprises electromagnetic devices which may be super conducting properties.
A biaxially textured article comprising a biaxially textured substrate having thereon at least one epitaxial nitride layer, said article further comprising an electro-magnetic device layer.
A biaxially textured article comprising a biaxially textured substrate having thereon at least one epitaxial layer of composition M1xM2yN, where M1 and M2 are metals selected from Ti, Ce, Y, Zr, Hf, V, Nb, Nd, La, and Al, and x and y refer to the atomic compositions of the two metals respectively, said article further comprising an electro-magnetic device layer.
Dependencies are inferred from the claim text.