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US 6,784,088 B2Granted
Method to selectively cap interconnects with indium or tin bronzes and/or oxides thereof and the interconnect so capped
AssigneeInternational Business Machines Corporation
InventorsDaniel C. Edelstein, Sung Kwon Kang, Maurice McGlashan-Powell, Eugene J. O'Sullivan, George F. Walker
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Abstract
A method to selectively cap a cooper BEOL terminal pad with a Cu/Sn/Au alloy. The method includes providing one or more Cu BEOL terminal pads and coating the pads with a Sn coating followed by coating the Sn with a Au coating. The coated pads are then annealed to form the Cu/Sn/Au capping alloy.
Claims10
A method to selectively cap the Cu terminal of a BEOL comprising:
- providing one or more Cu BEOL terminal pads;
- coating said pad with a layer of Sn by immersing in a selective immersion Sn plating bath;
- forming a coating of Au on said Sn layer;
- and
- annealing said Au and said Sn layers.
2 more elements
Dependencies are inferred from the claim text.