Quick turn around time system and method of use
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLin-Sheng Sun, Max Tuw, Wen Che Lu, Arthur Chen
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLin-Sheng Sun, Max Tuw, Wen Che Lu, Arthur Chen
Estimating the term…
The invention provides a quick turn around time system (QTAT) for locating an optimal arrangement of work orders within a wafer fabrication facility providing: a real time dispatching system having a software rule database; and at least one piece of fabrication equipment having an internal buffer in communication with the software rule database, wherein the real time dispatching system and the at least one piece of fabrication equipment cooperate to optimally prioritize a work order disposed within the internal buffer of the at least one piece of fabrication equipment. A load port reservation system for in-line processing and a plurality of batch editing functions for controlling batch formation is provided. Additionally provided are two alternative methods of using the QTAT to optimally prioritize work orders within the at least one piece of fabrication equipment's internal buffer.
A quick turn around time system for locating an optimal arrangement of work orders within a wafer fabrication facility, the quick turn around time system comprising:
A method of using a quick turn around time system for locating an optimal arrangement of work orders within a wafer fabrication facility, the method comprising the steps of:
A method of using a quick turn around time system for locating an optimal arrangement of work orders within a wafer fabrication facility, the method comprising the steps of:
Dependencies are inferred from the claim text.