Plasma processing container internal member and production method thereof
AssigneesTocalo Co., Ltd., Tokyo Electron Limited
InventorsYoshio Harada, Junichi Takeuchi, Tatsuya Hamaguchi, Nobuyuki Nagayama, Kouji Mitsuhashi
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Abstract
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.
Claims39
An internal member for a plasma treating vessel comprising a substrate and a Y2O3 sprayed coating covered on a surface thereof.
An internal member for a plasma treating vessel comprising a substrate, a metal coating formed on a surface thereof as an undercoat, and a Y2O3 sprayed coating formed on the undercoat as a top coat.
An internal member for a plasma treating vessel comprising a substrate, a metal coating formed on a surface thereof as an undercoat, a middle layer formed on the undercoat and a Y2O3 sprayed coating formed on the middle layer as a top coat.
A method of producing an internal member for a plasma treating vessel, which comprises Y2O3 on a surface of a substrate through a spraying proccess to form a Y2O3 sprayed coating.
A method of producing an internal member for a plasma treating vessel, which comprises applying at least one surface treating process selected from CVD process, PVD process and thermal spraying process to a surface of a substrate to form a composite layer composed of a layer of a metal of Ni, W, Mo or Ti or an alloy thereof as an undercoat and Y2O3 as a top coat.
A method of producing an internal member for a plasma treating vessel, which comprises applying at least one surface treating process selected from CVD process, PVD process and thermal spraying process to a surface of a substrate to form a composite layer composed of a layer of a metal of Ni, W, Mo or Ti or an alloy thereof as an undercoat, Al2O3 or a mixture of Al2O3 and Y2O3 as a middle layer and Y2O3 as a top coat.
Dependencies are inferred from the claim text.