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US 6,783,717 B2Granted
Process of fabricating a precision microcontact printing stamp
AssigneeInternational Business Machines Corporation
InventorsGareth Hougham, Peter Fryer, Ronald Nunes, Mary Beth Rothwell
Life of this patent
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Abstract
A process of making a high precision microcontact printing stamp in which an elastomeric monomer or oligomer is introduced into a mold wherein a photoresist master imprinted with a microcircuit design in negative relief is predisposed. The monomer or oligomer is cured at a temperature no higher than about ambient temperature whereby a distortion-free microcontact printing stamp having the microcircuit design of the photoresist master in positive relief is formed.
Claims12
A process for making a microcontact printing stamp comprising the steps of:
- predisposing a photoresist master having a microcircuit design in negative relief above a flexible stamp backplane in a mold;
- introducing a liquid elastomeric monomer or oligomer mixture into said mold so that said monomer or oligomer fills the space between said photoresist master and said flexible stamp backplane;
- curing said liquid elastomeric monomer or oligomer to form an elastomeric polymer at a temperature which is within a predetermined temperature range below an ambient temperature;
- and
- removing a cured elastomeric printing stamp, disposed on said flexible backplane, whose top surface conforms to the microcircuit design of said photoresist master.
2 more elements
Dependencies are inferred from the claim text.