Porous getter devices with reduced particle loss and method for manufacturing same
AssigneeSaes Getters S.P.A.
InventorsAndrea Conte, Marco Moraja
Life of this patent
Estimating the term…
Abstract
A method for reducing the loss of particles from the surface of porous getter bodies is taught herein. The method consists in producing on the surface of the porous getter a thin layer of a metal or metal alloy with a deposition technique selected among the deposition of materials from arc generated plasma, ionic beam deposition and cathodic deposition. The deposition technique allows for granular or columnar surface of the covering material but still allowing access to the surface of the getter material, resulting in a reduced getter particle loss.
Claims20
A porous getter body formed of particles of getter material connected together, wherein said getter particles at an upper surface of said body are partially covered with discrete deposits of a material selected from the group consisting of:
- transition metals, Rare Earths and aluminum;
- wherein each of said deposits have a thickness of at least 0.5 μm,
- whereby said deposits reduce the loss of particles in said porous getter body.
A purification device including:
- a porous getter body formed by a getter material made of getter particles:
- microdeposits of a thickness less than 5 μm and greater than 5 μm discretely covering a portion of an upper surface of said getter body, said microdeposits with a granular or columnar morphology allowing a gas to contact at least a portion of an upper surface of said costed getter particles, wherein a subset of said microdeposits bind said getter particles together at contact areas.
A purification device including:
- a getter body including connected getter grains of getter material means, said getter body with an upper surface and a lower body, wherein a gas can pass through said upper surface to contact said lower body;
- a series of deposits of a covering material means discretely covering said said getter body, wherein said series of deposits allows a gas to directly contact said getter grains without contacting said covering material means;
- and
- wherein said series of deposits binds at least a portion of said getter grains in said upper surface preventing particle loss.
Dependencies are inferred from the claim text.