Polishing apparatus
AssigneeEbara Corporation
InventorsHiroomi Torii, Hideo Aizawa, Soichi Isobe
Life of this patent
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Abstract
A polishing apparatus comprises a polishing table having a polishing surface thereon, a top ring for pressing a workpiece to be polished against the polishing surface, and a dresser for dressing the polishing surface on the polishing table. The dresser comprises a dressing element provided on a surface of the dresser for dressing the polishing surface by sliding contact with the polishing surface, and an ejection nozzle provided on the surface of the dresser for ejecting a fluid supplied from a fluid source toward the polishing surface.
Claims16
A polishing apparatus comprising:
- a polishing table having a polishing surface thereon;
- a top ring for pressing a workpiece to be polished against said polishing surface;
- and
- a dresser for dressing said polishing surface on the polishing table, said dresser including
- (i) a shaft to rotate said dresser about an axis passing through said dresser,
- (ii) a dressing element provided on a surface of said dresser for dressing said polishing surface by sliding contact with said polishing surface, and
- (iii) an ejection nozzle provided on the surface of said dresser for ejecting a fluid toward said polishing surface, said ejection nozzle being directed toward an outer circumferential edge of said dresser so as to eject the fluid toward the outer circumferential edge of said dresser,
- wherein said dressing element has a fluid flow hole defined therethrough for flowing the fluid to a lower surface of said dressing element, and a fluid ejection slot defined in the lower surface of said dressing element, and
- wherein said fluid ejection slot is extended from said fluid flow hole to an outer circumferential edge of said dressing element.
A dresser for dressing a polishing surface on a polishing table, said dresser comprising:
- a shaft to rotate said dresser about an axis passing through said dresser;
- a dressing element provided on a surface of said dresser for dressing said polishing surface by sliding contact with the polishing surface;
- and
- an ejection nozzle provided on the surface of said dresser for ejecting a fluid toward the polishing surface, said ejection nozzle being directed toward an outer circumferential edge of said dresser so as to eject the fluid toward the outer circumferential edge of said dresser,
- wherein said dressing element has a fluid flow hole defined therethrough for flowing the fluid to a lower surface of said dressing element, and a fluid ejection slot defined in the lower surface of said dressing element, and
- wherein said fluid ejection slot is extended from said fluid flow hole to an outer circumferential edge of said dressing element.
Dependencies are inferred from the claim text.