Additives for pressure sensitive polishing compositions
AssigneeApplied Materials, Inc.
InventorsJui-Lung Li, Yuchun Wang, Rajeev Bajaj, Fred C. Redeker
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Abstract
A method and composition for planarizing a substrate. The composition includes a pressure sensitive solution and one or more chemical agents for complexing with a metal or oxidized metal. The method for removal of a copper containing layer from a substrate surface, comprising applying a composition to a polishing media, the composition comprising a pressure sensitive solution, and one or more chemical agents for complexing with a metal or oxidized metal, and polishing the substrate surface with the polishing media.
Claims20
A method for planarizing a substrate surface, comprising:
- applying a composition to polishing media, the composition comprising:
- a pressure sensitive solution;
- one or more chemical agents comprising a complexing agent for complexing with a metal or oxidized metal, wherein the complexing agent is selected from the group of ammonium salts of organic acids, amines, amine derivatives, compounds with one or more peroxy acid groups, ions of at least one transition metal, and combinations thereof;
- and
- a corrosion inhibitor;
- and
- polishing the substrate surface.
A method for removal of a copper containing layer from a substrate surface, comprising:
- applying a composition to a polishing media, the composition comprising:
- a pressure sensitive solution;
- about 1 wt. % or less of a solution containing ammonium salts of organic acids;
- about 10 wt. % or less abrasive particles;
- and
- a corrosion inhibitor;
- and
- polishing the substrate surface with the polishing media.
A composition for planarizing a substrate, comprising:
- a pressure sensitive solution;
- one or more chemical agents comprising a complexing agent for complexing with a metal or oxidized metal, wherein the complexing agent is selected from the group of ammonium salts of organic acids, amines, amine derivatives, compounds with one or more peroxy acid groups, ion of at least one transition metal, and combinations thereof;
- and
- a corrosion inhibitor.
Dependencies are inferred from the claim text.