Clamp actuation mechanism
AssigneeAsm Technology Singapore Pte Ltd
InventorsYou Yong Liao, Ajit Gaunekar, Gary Peter Widdowson
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Abstract
The invention provides an apparatus and method for clamping an object. The apparatus comprises a clamping mechanism and an actuation system to actuate clamping and de-clamping of the clamping mechanism, wherein the actuation system comprises two actuator devices which are operatively coupled whereby to provide an actuation force to the clamping mechanism. Preferably, the actuator devices comprises a variable reluctance actuator and a linear induction actuator coupled together and adapted to cooperate to provide the actuation force to the clamping mechanism.
Claims16
An apparatus for clamping an object, comprising a clamping mechanism and an actuation system to actuate clamping and de-clamping of the clamping mechanism, wherein the actuation system comprises two actuator devices which are operatively coupled whereby to provide an actuation force to the clamping mechanism, wherein the two actuator devices respectively comprise a variable reluctance actuator and a linear induction actuator coupled together and adapted to cooperate to provide the actuation force to the clamping mechanism.
Dependencies are inferred from the claim text.