Gas recirculation flow control method and apparatus for use in vacuum system

A gas recirculation flow control method for use in an evacuation system having a vacuum chamber into which a gas is introduced, a first vacuum pump for exhausting said gas from said vacuum chamber and reducing a pressure in said vacuum chamber to a desired pressure, a second vacuum pump for performing evacuation to lower a back pressure of said first vacuum pump below an allowable back pressure, and a gas recirculation line for returning a part of gas exhausted from said first vacuum pump to said vacuum chamber,

• wherein a recirculation flow rate Q2 of the gas returning to said vacuum chamber through said gas recirculation line is controlled by adjusting a differential pressure Pd−Pc in said gas recirculation line by varying a flow rate of a purge gas introduced upstream or inside said second vacuum pump, said purge gas consisting of at least one substance used as a component of the gas introduced into said vacuum chamber, by using the following relationship:
• Q2=C×(Pd−Pc)
• where:
• Q2 denotes the recirculation flow rate of the gas returning to said vacuum chamber through said gas recirculation line;
• Pc denotes a pressure in said vacuum chamber;
• Pd denotes a pressure in an upstream side of said gas recirculation line;
• and C denotes a conductance of said gas recirculation line.

A gas recirculation flow control method for use in an evacuation system having a vacuum chamber into which a gas is introduced, a first vacuum pump for exhausting said gas from said vacuum chamber and reducing a pressure in said vacuum chamber to a desired pressure, a second vacuum pump for performing evacuation to lower a back pressure of said first vacuum pump below an allowable back pressure, and a gas recirculation line for returning a part of gas exhausted from said first vacuum pump to said vacuum chamber,

• wherein a recirculation flow rate Q2 of the gas returning to said vacuum chamber through said gas recirculation line is controlled according to a control procedure including the steps {circle around (1)} to {circle around (3)}:
• {circle around (1)} introducing, in a non-recirculating state, the gas into said vacuum chamber at an arbitrary flow rate Qt, and adjusting and fixing an effective pumping speed of said first vacuum pump to an level sufficient to make a pressure Pc in said vacuum chamber equal to a desired pressure P1;
• {circle around (2)} changing the flow rate of the gas introduced into said vacuum chamber to Q1=Qt×(100−A)/100, which corresponds to an arbitrary recirculation ratio A {A=(Q2/Qt×100)}%, while fixing the effective pumping speed of said first vacuum pump at a same level as in the step {circle around (1)};
• and
• {circle around (3)} opening said gas recirculation line, and in a gas recirculating state, adjusting an effective pumping speed of said second vacuum pump so that the pressure Pc in said vacuum chamber becomes equal to the pressure P1 obtained at the step {circle around (1)}.

A gas recirculation flow control method for use in an evacuation system having a vacuum chamber into which a gas is introduced, a first vacuum pump for exhausting said gas from said vacuum chamber and reducing a pressure in said vacuum chamber to a desired pressure, a second vacuum pump for performing evacuation to lower a back pressure of said first vacuum pump below an allowable back pressure, and a gas recirculation line for returning a part of gas exhausted from said first vacuum pump to said vacuum chamber,

• wherein a recirculation flow rate Q2 of the gas returning to said vacuum chamber through said gas recirculation line is controlled according to a control procedure including the steps {circle around (1)} to {circle around (3)}:
• {circle around (1)} introducing, in a non-recirculating state, the gas into said vacuum chamber at an arbitrary flow rate Qt, and adjusting and fixing an effective pumping speed of said first vacuum pump to an level sufficient to make a pressure Pc in said vacuum chamber equal to a desired pressure P1;
• {circle around (2)} changing the flow rate of the gas introduced into said vacuum chamber to Q1=Qt×(100−A)/100, which corresponds to an arbitrary recirculation ratio A {A=(Q2/Qt×100)}%, while fixing the effective pumping speed of said first vacuum pump at a same level as in the step {circle around (1)};
• and
• {circle around (3)} opening said gas recirculation line, and in a gas recirculating state, adjusting a flow rate of a purge gas introduced upstream or inside said second vacuum pump so that the pressure Pc in said vacuum chamber becomes equal to the pressure P1 obtained at the step {circle around (1)}, said purge gas consisting of at least one substance used as a component of the gas introduced into said vacuum chamber.

A gas recirculation flow control apparatus for use in an evacuation system having a vacuum chamber into which a gas is introduced, a first vacuum pump for exhausting said gas from said vacuum chamber and reducing a pressure in said vacuum chamber to a desired pressure, a second vacuum pump for performing evacuation to lower a back pressure of said first vacuum pump below an allowable back pressure, a gas recirculation line for returning a part of gas exhausted from said first vacuum pump to said vacuum chamber, a first pressure sensor for detecting the pressure in said vacuum chamber, and a second pressure sensor for detecting a pressure in an upstream side of said gas recirculation line,

• said gas recirculation flow control apparatus comprising gas recirculation flow control means for controlling a recirculation flow rate Q2 of the gas returning to said vacuum chamber through said gas recirculation line by adjusting a differential pressure Pd−Pc in said gas recirculation line by varying an effective pumping speed of said second vacuum pump using the following relationship:
• Q2=C×(Pd−Pc)
• where:
• Q2 denotes the recirculation flow rate of the gas returning to said vacuum chamber through said gas recirculation line;
• Pc denotes a pressure detected with said first pressure sensor;
• Pd denotes a pressure detected with said second pressure sensor;
• and C denotes a conductance of said gas recirculation line.

A gas recirculation flow control apparatus for use in an evacuation system having a vacuum chamber into which a gas is introduced, a first vacuum pump for exhausting said gas from said vacuum chamber and reducing a pressure in said vacuum chamber to a desired pressure, a second vacuum pump for performing evacuation to lower a back pressure of said first vacuum pump below an allowable back pressure, a gas recirculation line for returning a part of gas exhausted from said first vacuum pump to said vacuum chamber, a first pressure sensor for detecting the pressure in said vacuum chamber, and a second pressure sensor for detecting a pressure in an upstream side of said gas recirculation line,

• said gas recirculation flow control apparatus comprising gas recirculation flow control means for controlling a recirculation flow rate Q2 of the gas returning to said vacuum chamber through said gas recirculation line by adjusting a differential pressure Pd−Pc in said gas recirculation line by varying a flow rate of a purge gas introduced upstream or inside said second vacuum pump, said purge gas consisting of at least one substance used as a component of the gas introduced into said vacuum chamber, by using the following relationship:
• Q2=C×(Pd−Pc)
• where:
• Q2 denotes the recirculation flow rate of the gas returning to said vacuum chamber through said gas recirculation line;
• Pc denotes a pressure in said vacuum chamber;
• Pd denotes a pressure in an upstream side of said gas recirculation line;
• and C denotes a conductance of said gas recirculation line.

A gas recirculation flow control apparatus for use in an evacuation system having a vacuum chamber into which a gas is introduced, a first vacuum pump for exhausting said gas from said vacuum chamber and reducing a pressure in said vacuum chamber to a desired pressure, a second vacuum pump for performing evacuation to lower a back pressure of said first vacuum pump below an allowable back pressure, a gas recirculation line for returning a part of gas exhausted from said first vacuum pump to said vacuum chamber, a first pressure sensor for detecting the pressure in said vacuum chamber, a second pressure sensor for detecting a pressure in an upstream side of said gas recirculation line, and an on-off valve for selectively opening and closing said gas recirculation line,

• said gas recirculation flow control apparatus comprising gas recirculation flow control means for controlling a recirculation flow rate Q2 of the gas returning to said vacuum chamber through said gas recirculation line by {circle around (1)} closing said on-off valve and introducing the gas into said vacuum chamber at an arbitrary flow rate Qt, adjusting an effective pumping speed V of said first vacuum pump and fixing it to V1 to make a pressure Pc detected with said first pressure sensor equal to a desired pressure P1, {circle around (2)} and changing the flow rate of the gas introduced into said vacuum chamber to Q1=Qt×(100−A)/100, which corresponds to an arbitrary recirculation ratio A {A=(Q2/Qt×100)}%, while fixing the effective pumping speed V of said first vacuum pump at said V1, {circle around (3)} and then opening said on-off valve and adjusting an effective pumping speed of said second vacuum pump so that the pressure Pc detected with said first pressure sensor becomes equal to said pressure P1.

A gas recirculation flow control apparatus for use in an evacuation system having a vacuum chamber into which a gas is introduced, a first vacuum pump for exhausting said gas from said vacuum chamber and reducing a pressure in said vacuum chamber to a desired pressure, a second vacuum pump for performing evacuation to lower a back pressure of said first vacuum pump below an allowable back pressure, a gas recirculation line for returning a part of gas exhausted from said first vacuum pump to said vacuum chamber, a first pressure sensor for detecting the pressure in said vacuum chamber, a second pressure sensor for detecting a pressure in an upstream side of said gas recirculation line, and an on-off valve for selectively opening and closing said gas recirculation line,

• said gas recirculation flow control apparatus comprising gas recirculation flow control means for controlling a recirculation flow rate Q2 of the gas returning to said vacuum chamber through said gas recirculation line by {circle around (1)} closing said on-off valve and introducing the gas into said vacuum chamber at an arbitrary flow rate Qt, adjusting an effective pumping speed V of said first vacuum pump and fixing it to V1 to make a pressure Pc detected with said first pressure sensor equal to a desired pressure P1, {circle around (2)} and changing the flow rate of the gas introduced into said vacuum chamber to Q1=Qt×(100−A)/100, which corresponds to an arbitrary recirculation ratio A {A=(Q2/Qt×100)}%, while fixing the effective pumping speed V of said first vacuum pump at said V1, {circle around (3)} and then opening said on-off valve and adjusting a flow rate of a purge gas introduced upstream or inside said second vacuum pump so that the pressure Pc detected with said first pressure sensor becomes equal to said pressure P1, said purge gas consisting of at least one substance used as a component of the gas introduced into said vacuum chamber.