Sulfuric acid recycle apparatus

A sulfuric acid recycle apparatus for recycling sulfuric acid in a wafer cleaning fluid prepared by mixing sulfuric acid and hydrogen peroxide solution comprising:

• a reaction bath having two openings formed of at least an introduction port and a discharge port for obtaining concentrated sulfuric acid by concentrating sulfuric acid in the wafer cleaning waste fluid introduced from the introduction port upon completion of a wafer cleaning process, said reaction bath including therein a plurality of partition plates for changing an advancing direction of the wafer cleaning waste fluid, and an inclination plate positioned at a portion closer to the discharge port than the partition plates so that the concentrated sulfuric acid flows along a surface thereof and then discharges into the discharge port;
• a wafer processing bath for processing wafers;
• and
• a supply unit for supplying the concentrated sulfuric acid to the wafer processing bath.