Micromechanical component and equalization method
AssigneeRobert Bosch GmbH
InventorsJoerg Muchow, Jochen Franz, Uwe Lipphardt, Andreas Duell, Wolfgang Romes
Life of this patent
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Abstract
A micromechanical component, in particular a pressure sensor, including a substrate that has a membrane region, a surrounding region of the membrane region, at least one measuring resistance provided in the membrane region and modifiable by deformation of the membrane region, and a corresponding evaluation circuit provided in the surrounding region. An interference effect on the measuring resistance is producible by way of a deformation of parts, in particular conductor paths, of the evaluation circuit relative to the substrate. The invention also creates a corresponding equalization method on a test chip or as an individual final equalization.
Claims12
A micromechanical component, comprising:
- a substrate including a membrane region and a surrounding region, the surrounding region surrounding the membrane region;
- at least one measuring resistance disposed in the membrane region, wherein the measuring resistance is modifiable by deformation of the membrane region;
- an evaluation circuit disposed in the surrounding region and including a plurality of conductor paths configured such that a deformation of the conductor paths relative to the substrate generates an interference effect on the measuring resistance;
- and
- at least one patch disposed in at least one of the surrounding region and the membrane region, the patch being configured such that a deformation of the patch relative to the substrate generates an analog interference effect, the analog interference effect compensating for the interference effect acting on the measuring resistance.
An equalization method for a micromechanical component, the micromechanical component comprising a substrate including a membrane region and a surrounding region, the surrounding region surrounding the membrane region, at least one measuring resistance disposed in the membrane region, the measuring resistance being modifiable by deformation of the membrane region, an evaluation circuit disposed in the surrounding region including a plurality or conductor paths configured such that a deformation of the conductor paths relative to the substrate generates an interference effect on the measuring resistance, patches disposed in at least one of the surrounding region and the membrane region, the patches being configured so that a deformation of the patch relative to the substrate generates an analog interference effect, the analog interference effect compensating for the interference effect acting on the measuring resistance, and a compensating resistance device configured so that at least one compensating resistance is connectable to the measuring resistance, respective ones of the patches being provided in a region of the at least one compensating resistance, the method comprising:
- connecting select ones of the at least one compensating resistance;
- and
- optimizing the selection of the select one of the at least one compensation resistance on a test chip.
An equalization method for a micromechanical component, the micromechanical component comprising a substrate including a membrane region and a surrounding region, the surrounding region surrounding the membrane region, at least one measuring resistance disposed in the membrane region, the measuring resistance being modifiable by deformation of the membrane region, an evaluation circuit disposed in the surrounding region including a plurality of conductor paths configured such that a deformation of the conductor paths relative to the substrate generates an interference effect an the measuring resistance, patches disposed in at least one of the surrounding region and the membrane region, the patches being configured so that a deformation of the patch relative to the substrate generates an analog interference effect, the analog interference effect compensating for the interference effect acting on the measuring resistance, and a compensating resistance device configured so that at least one compensating resistance is connectable to the measuring resistance, respective ones of the patches being provided in a region of the at least one compensating resistance, the method comprising:
- connecting select ones of the at least one compensating resistance;
- and
- optimizing the selection of the select one of the at least one compensating resistance in a final individual equalization.
Dependencies are inferred from the claim text.