Micromechanical component
AssigneeRobert Bosch GmbH
InventorStefan Pinter
Life of this patent
Estimating the term…
Abstract
The invention creates a micromechanical component, in particular an acceleration sensor, having a flexible spring device (F1, F2, F3) for the spring mounting of a mass (3) over a substrate (4), the flexible spring device (F1, F2, F3) being on the one hand connected with the mass (3) and being on the other hand anchored in the substrate (4). The flexible spring device (F1, F2, F3) has at least one flexible spring element (F2, F3) whose movability in relation to the substrate (4) is capable of being modified in order to modify the effective spring constant of the flexible spring device (F1, F2, F3).
Claims23
A micromechanical component, comprising:
- a substrate;
- a mass;
- and
- a flexible spring device for a spring mounting of the mass over the substrate, the flexible spring device being connected on the one hand with the mass and on the other hand being anchored in the substrate, wherein:
- the flexible spring device includes at least one flexible spring element having a movability in relation to the substrate that is capable of being modified in order to modify an effective spring constant of the flexible spring device, and
- the effective spring constant is modifiable as a function of a current.
A micromechanical component, comprising:
- a substrate;
- a mass;
- a flexible spring device for a spring mounting of the mass over the substrate, the flexible spring device being connected on the one hand with the mass and on the other hand being anchored in the substrate, wherein the flexible spring device includes at least one flexible spring element having a movability in relation to the substrate that is capable of being modified in order to modify an effective spring constant of the flexible spring device;
- a first connecting web;
- and
- a first isolatable anchoring structure provided at the first connecting web for an isolatable anchoring of the first connecting web in relation to the substrate, wherein the mass is connected with a first spring element of the flexible spring device that is capable of being moved in relation to the substrate, and the first spring element is connected, via the first connecting web, with an end of a second spring element of the flexible spring device.
A micromechanical component, comprising:
- a substrate;
- a mass;
- a flexible spring device for a spring mounting of the mass over the substrate, the flexible spring device being connected on the one hand with the mass and on the other hand being anchored in the substrate, wherein the flexible spring device includes at least one flexible spring element having a movability in relation to the substrate that is capable of being modified in order to modify an effective spring constant of the flexible spring device;
- a first connecting web;
- and
- a first controllable anchoring structure, wherein:
- the mass is connected with a first spring element of the flexible spring device that is capable of being moved in relation to the substrate, and is connected, via the first connecting web, with an end of a second spring element of the flexible spring device, and
- the first controllable anchoring structure is provided at the first connecting web for a controllable anchoring of the first connecting web in relation to the substrate.
Dependencies are inferred from the claim text.