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US 6,782,748 B2Granted
High-G acceleration protection by caging
AssigneeHoneywell International Inc.
InventorsMark W. Weber, William A. Harris, Max C. Glenn
Life of this patent
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AssigneeHoneywell International Inc.
InventorsMark W. Weber, William A. Harris, Max C. Glenn
Estimating the term…
For use in a MEMS device having a suspended proof mass, a method and apparatus for securing the MEMS device during a period of high acceleration. The method may include applying a DC voltage between the proof mass and a non-suspended structure of the device. The non-suspended structure may be mounted on a substrate, and the substrate or the non-suspended structure may be electrically isolated from the proof mass by an insulating layer or by one or more islands. Applying the DC voltage creates an electrostatic force that moves the proof mass toward (or holds the proof mass near) the substrate. Movement of the proof mass may be limited by mechanical contact between the proof mass and the insulating layer, the one or more islands, or by a cage mounted on the substrate during the period of high acceleration.
For use in a MEMS device having a proof mass flexibly coupled to a substrate, the proof mass having a normal operating range of motion, a method for securing the MEMS device during a period of high acceleration, the method comprising applying a DC voltage between the proof mass and a non-suspended structure of the device, the DC voltage being sufficient to create an electrostatic force that maintains the proof mass in a displaced position that is outside the normal operating range of motion of the proof mass.
A micromachined device comprising:
A micromachined device comprising:
Dependencies are inferred from the claim text.