Method of fabricating a fluid ejector

Abstract

A method of fabricating a fluid ejector is disclosed. In the present embodiment, a plurality of thin film layers are deposited on a first surface of a printhead substrate, the plurality of thin film layers form a thin film membrane. At least one of the layers forms a plurality of fluid ejection elements, and at least another of the layers forms a plurality of conductive leads to the fluid ejection elements. A plurality of fluid feed holes are formed in the thin film membrane. At least one opening in a second surface of the substrate is formed, the opening providing a fluid path from a second surface of the substrate through the substrate. The plurality of fluid feed holes are located over the at least one opening in the substrate, and all portions of the fluid ejection elements and conductive leads overlie the substrate.

Dependencies are inferred from the claim text.