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US 6,780,759 B2Granted
Method for multi-frequency bonding
AssigneeSilicon Genesis Corporation
InventorsShari N. Farrens, Mark A. Franklin, William J. Franklin, Wei Liu
Life of this patent
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Abstract
A method and technique for achieving a high strength bond between two substrates includes igniting a plasma using a source RF signal. The substrates are biased with a bias RF signal during surface treatment by the plasma. The treated surfaces are brought into contact. The resulting bonded substrates show an improvement over bonds attained using conventional bonding techniques.
Claims30
A method for bonding substrates comprising:
- providing a first substrate having a first surface to be bonded;
- supplying a first gas;
- igniting said first gas to produce a plasma by a first frequency signal and applying said first signal to a first electrode that applies the first frequency signal to the first gas;
- producing a second frequency signal;
- applying said second frequency signal to said first substrate, said first surface of said first substrate being exposed to said plasma without etching said first surface;
- and
- contacting said first surface of said first substrate to a first surface of a second substrate to produce a bond therebetween.
4 more elements
A method for bonding substrates comprising:
- providing a plasma including supplying a first gas and applying a first radio frequency (RF) signal to a first electrode, wherein said gas is ignited to form said plasma;
- applying a second RF signal to a second electrode, said second RF signal having a frequency less than a frequency of said first RF signal;
- disposing a first substrate in electrical contact with said second substrate, a first surface of said first substrate being exposed to said plasma;
- spacing said first electrode from said first surface such that there is substantially no etching of said first substrate by said plasma;
- and
- contacting said first surface of said first substrate to a first surface of a second substrate.
3 more elements
Dependencies are inferred from the claim text.