Forming tool for forming a contoured microelectronic spring mold
AssigneeFormFactor, Inc.
InventorsBenjamin N. Eldridge, Stuart W. Wenzel
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Abstract
A forming tool with one or more embossing tooth, and preferably, a plurality of such embossing teeth, arranged on a substantially planar substrate, is disclosed. Each embossing tooth is configured for forming a sacrificial layer to provide a contoured surface for forming a microelectronic spring structure. Each embossing tooth has a protruding area corresponding to a base of a microelectronic spring, and a sloped portion corresponding to a beam contour of a microelectronic spring. Numerous methods for making a forming tool are also disclosed. The methods include a material removal method, a molding method, a repetitive-stamping method, tang-bending methods, and segment-assembly methods.
Claims38
A microelectronic spring contact mold forming tool, comprising:
- abase;
- and
- a plurality of embossing teeth attached to said base, each said embossing tooth comprising a protruding portion and a sloped portion,
- wherein said plurality of teeth are disposed in a spatial relationship one to another such that a location of each said protruding portion corresponds to an electrical connection location on an electronic device,
- wherein said embossing teeth extend through said base, and
- wherein said base is substantially opaque to radiation and said embossing teeth are substantially transparent to radiation.
Dependencies are inferred from the claim text.