Method of manufacturing piezoelectric actuator
AssigneeSeiko Instruments Inc.
InventorsMakoto Suzuki, Akihiro Iino, Masao Kasuga, Keitarou Koroishi
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Abstract
In a method of manufacturing a piezoelectric actuator there are provided a piece of piezoelectric material having piezoelectric bodies, a first piece of material having vibrational bodies, a second piece of material having movable bodies, and a third piece of material having pressurizing members. The first, second and third pieces of materials are superimposed over the piece of piezoelectric material to form a multilayered structure having piezoelectric actuators. The multilayered structure is cut to separate each of the piezoelectric actuators from one another.
Claims15
A method of manufacturing a piezoelectric actuator, comprising the steps of:
- providing a piece of piezoelectric material having a plurality of piezoelectric bodies;
- providing a first piece of material having a plurality of vibrational bodies;
- providing a second piece of material having a plurality of movable bodies;
- providing a third piece of material having a plurality of pressurizing members;
- superimposing the first, second and third pieces of materials over the piece of piezoelectric material to form a multilayered structure having a plurality of piezoelectric actuators;
- and
- cutting the multilayered structure to separate each of the piezoelectric actuators from one another.
A method of manufacturing a piezoelectric actuator, comprising the steps of:
- providing a piece of piezoelectric material having a plurality of piezoelectric bodies;
- forming electrode patterns on opposite main surfaces of the piece of piezoelectric material;
- disposing on the piece of piezoelectric material a first piece of material having a plurality of vibrational bodies so that each of the vibrational bodies overlies respective ones of the piezoelectric bodies;
- disposing on the first piece of material a second piece of material having a plurality of movable bodies so that each of the movable bodies overlies respective ones of the vibrational bodies;
- disposing on the second piece of material a third piece of material having a plurality of pressurizing members so that each of the pressurizing members overlies respective ones of the movable bodies to thereby form a multilayered structure having a plurality of piezoelectric actuators;
- and
- cutting the multilayered structure to separate each of the piezoelectric actuators from one another.
A method of manufacturing a piezoelectric actuator, comprising the steps of:
- forming on a sheet of piezoelectric material a plurality of piezoelectric bodies each having a central hole;
- forming on a first sheet of material a plurality of vibrational bodies each having a central hole and a pair of protrusions disposed symmetrically with respect to the central hole;
- forming on a second sheet of material a plurality of movable bodies each having a central hole;
- forming on a third sheet of material a plurality of pressurizing members each having a central hole;
- disposing the first sheet of material on the sheet of piezoelectric material so that each of the vibrational bodies contacts respective ones of the piezoelectric bodies with the corresponding central holes being disposed in aligned relation;
- connecting each of a plurality of support members with respective ones of the contacting vibrational bodies and piezoelectric bodies so that the support member extends through the aligned central holes of the overlapped vibrational body and piezoelectric body;
- disposing the second sheet of material on the first sheet of material so that each of the movable bodies contacts the protrusions of respective ones of the vibrational bodies and so that each of the support members extends through the central hole of respective ones of the vibrational bodies;
- disposing the third sheet of material on the second sheet of material so that each of the pressurizing members contacts respective ones of the movable bodies and so that each of the support members extends through the central hole of respective ones of the pressurizing members to thereby form a multilayered structure having a plurality of piezoelectric actuators;
- and
- cutting the multilayered structure to separate each of the piezoelectric actuators from one another.
Dependencies are inferred from the claim text.