Bistable micromirror with contactless stops
AssigneePTS Corporation
InventorLilac Muller
Life of this patent
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Abstract
A microstructure for steering light is provided that mitigates stiction. A substrate is provided on which a structural linkage is connected to support a structural film. The structural film includes a reflective coating. A hold electrode is connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate. It is configured to hold the structural film electrostatically in a tilted position with respect to the substrate upon application of a potential difference between the structural film and the hold electrode. Because of its positioning with respect to the structural film, it is ensured that the structural film is not in contact with the substrate when the structural film is being held by the hold electrode.
Claims9
A method for operating an optical switch, the method comprising:
- tilting a first end of a micromirror assembly towards a substrate by applying a first electrostatic force;
- and
- thereafter, holding the micromirror assembly in a first tilted position with respect to the substrate with a second electrostatic force originating from a point laterally beyond an orthogonal projection of the micromirror assembly on the substrate.
Dependencies are inferred from the claim text.