Thermopile infrared sensor and method for inspecting the same

A thermopile infrared sensor comprising:

• a semiconductor substrate;
• and
• a series circuit formed on the semiconductor substrate, wherein the series circuit includes:
• first and second end terminals;
• a set of thermocouples electrically connected in series between the first end terminal and the second end terminal, wherein the set of thermocouples includes dissimilar electrically conductive materials, which are alternately electrically connected in series on the semiconductor substrate such that a plurality of hot junctions and a plurality of cold junctions are alternately formed by the dissimilar electrically conductive materials, wherein each hot junction shows a substantial temperature increase upon absorption of infrared radiation while each cold junction shows little or no substantial temperature increase upon absorption of the infrared radiation, and wherein an electromotive force generated by a difference in temperature between each of the hot junctions and adjacent one of the cold junctions is outputted from the series circuit through the first and second end terminals;
• and
• at least one electrical inspection terminal, which extends from a corresponding intermediate point in the series circuit between the first end terminal and the second end terminal to divide the set of thermocouples into at least two groups of thermocouples and to allow inspection of each group of thermocouples, wherein the at least one electrical inspection terminal is spaced away from each hot junction and each cold junction.

A thermopile infrared sensor comprising:

• a semiconductor substrate;
• and
• a series circuit formed on the semiconductor substrate, wherein the series circuit includes:
• a first end terminal;
• a second end terminal;
• two or more thermocouples electrically connected in series between the first end terminal and the second end terminal;
• and
• one or more intermediate inspection terminals, extending from one or more intermediate points in the series circuit, respectively, between the first end terminal and the second end terminal,
• wherein the one or more inspection terminals are spaced away from the two or more thermocouples.