Method of making a magnetic head with aligned pole tips

A method of forming a magnetic head comprising the steps of:

• (a) providing a substrate with a planar surface;
• (b) forming at least one cavity in said substrate;
• (c) lining said at least one cavity and said planar surface with a second pole tip layer;
• (d) patterning an inductive coil in said at least one cavity and dielectrically separating said coil from said second pole tip layer;
• (e) depositing a gap layer over said second pole tip layer on said planar surface;
• (f) depositing a first pole tip layer over said gap layer;
• (g) patterning a masking layer over said first pole tip layer;
• (h) etching said first pole tip layer, said gap layer and said second pole tip layer on said planar surface through said masking layer such that a stack of layers is formed on said planar surface;
• (i) depositing a protective layer over and around said stack of layers;
• (j) leveling said protective layer such that said first pole tip layer in said stack of layers is exposed;
• and
• (k) patterning a first yoke layer over said protective layer such that a portion of said first yoke layer is in contact with said first pole tip layer.