Semiconductor factory automation system and method for monitoring operational failure of stocker

A semiconductor factory automation (FA) system, comprising:

• at least one stocker for stocking a semiconductor wafer cassette, wherein said stocker is divided into a plurality of parts;
• a generation means for generating stocker state information representing an operational state of said stocker in response to a stocker state signal issued from said stocker, said stocker state information including identification information representing said stocker;
• identification information representing at least one part contained in said stocker;
• and a flag representing whether at least one part contained in said stocker has failed;
• a monitoring means for inspecting the stocker state information to update the operational state of said stocker previously stored;
• and for generating a warning signal when at least one part contained in said stocker has failed;
• and
• a warning means for generating an audiovisual warning sign in response to the warning signal.

A method for monitoring an operational failure of a stocker for use in a semiconductor factory automation system, wherein the stocker is divided into a plurality of operational parts, comprising the steps of:

• a) generating stocker state information representing an operational state of the stocker in response to a stocker state signal issued from the stocker, said stocker state information including identification information representing said stocker;
• identification information representing at least one part contained in said stocker;
• and a flag representing whether at least one part contained in said stocker has failed;
• b) inspecting the stocker state information to update the operational state of the stocker previously stored;
• c) generating a warning signal when at least one part contained in the stocker has failed;
• and
• d) generating an audiovisual warning sign in response to the warning signal.