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US 6,770,878 B2Granted
Electron/ion gun for electron or ion beams with high monochromasy or high current density
AssigneeCEOS Corrected Electron Optical Systems GmbH
InventorsStephan Uhlemann, Maximilian Haider
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Abstract
The invention relates to an electron/ion gun for electron or ion beams, including a beam source and a monochromator. According to the invention, the monochromator is equipped with an additional beam guidance system and a switchover element which are provided at the input of the monochromator, and which convey the particles coming from the beam source to either the monochromator or the rest of the beam guidance system.
Claims8
A beam generating system for electrons or ion beams comprising:
- a monochromator with deflection fields, which, in the dispersive plane, generates an astigmatic intermediate image of the beam source, and a slit aperture in the dispersive plane with an orientation of the slit in the direction of longitudinal extension of the astigmatic intermediate image, the monochromator being equipped with an additional beam guidance system and having at its output a switch element, which guides the particles arriving from the particle source either into the monochromator or to the additional beam guidance system,
- wherein the monochromator is equipped with deflection fields and a radiation source is present, which is imaged by the deflection fields to form the astigmatic intermediate image.
Dependencies are inferred from the claim text.