Method and system for processing measurement signals to obtain a value for a physical parameter
AssigneePerceptron, Inc.
InventorsJohn W. Dixon, Jeffrey S. White, Frederick P. LaPlant
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Abstract
In a measurement system wherein time-varying physical signals containing frequency information related to a physical parameter of an object are measured to obtain corresponding time-varying measurement signals, a method and system are disclosed for processing the measurement signals to obtain a value for the physical parameter by first extracting the frequency information from the measurement signals. The frequency information includes at least one desired frequency. The physical signals are electromagnetic signals. The object is a film such as a layer formed on a substrate, the physical parameter may be thickness of the layer.
Claims48
In a measurement system wherein time-varying physical signals containing frequency information related to a physical parameter of an object are measured to obtain corresponding time varying measurement signals, a method for processing the measurement signals to obtain a value, for the physical parameter, the method comprising the steps of:
- extracting the frequency information from the measurement signals of the object in a first fluid state, the frequency information including at least one desired frequency;
- and
- converting the frequency information to a value for the physical parameter of the object in a second state.
In a measurement system wherein time-varying physical signals containing frequency information related to a physical parameter of an object are measured to obtain corresponding time-varying measurement signals, a system for processing the measurement signals to obtain a value for the physical parameter, the system comprising:
- means for extracting the frequency information from the measurement signals of the object in a first state, frequency information including at least one desired frequency;
- and
- means for converting the frequency information to a value for the physical parameter of the object in a second state.
In a measurement system wherein time-varying physical signals containing frequency information related to a physical parameter of an object are measured to obtain corresponding time-varying measurement signals, a method for processing the measurement signals to obtain a value for the physical parameter, the method comprising the steps of:
- extracting the frequency information for the measurement signals, the frequency information including at least one desired frequency whereby the frequency information is extractable without containing the object;
- converting the frequency information to a value for the physical parameter;
- and
- wherein the physical parameter changes in value over time from an initial value to a value and wherein the step of converting includes the step of predicting the final value from the initial value.
In a measurement system wherein time-varying physical signals containing frequency information related to a physical parameter of an object are measured to obtain corresponding time-varying measurement signals, a method for processing the measurement signals to obtain a value for the physical parameter, the method comprising the steps of:
- extracting the frequency information from the measurement signals, the frequency information including at least one desired frequency whereby the frequency information is extractable without contacting the object;
- converting the frequency information to a value for the physical parameter;
- and
- wherein the measurement signals are discrete time signals and wherein the step of extracting includes the step of transforming the discrete-time signals to a Z-domain and wherein the frequency information is contained in at least one zero or pole in the z-domain.
In a measurement system wherein time-varying physical signals containing frequency information related to a physical parameter of an object are measured to obtain corresponding time-varying measurement signals, a system for processing the measurement signals to obtain a value for the physical parameter, the system comprising:
- means for extracting the frequency information from the measurement signals, the frequency information including at least one desired frequency, whereby the frequency information is extractable without contacting the object;
- means for converting the frequency information to a value for the physical parameter;
- and
- wherein the physical parameter changes in value over time from an initial value to a final value and wherein the means for converting includes means for predicting the final value from the initial value.
In a measurement system wherein time-varying physical signals containing frequency information related to a physical parameter of an object are measured to obtain corresponding time-varying measurement signals, a system for processing the measurement signals to obtain a value for the physical parameter, the system comprising:
- means for extracting the frequency information from the measurement signals, the frequency information including at least one desired frequency, whereby the frequency information is extractable without contacting the object;
- means for converting the frequency information to a value for the physical parameter;
- and
- wherein the measurement signals are discrete time signals and wherein the means for extracting includes means for transforming the discrete-time signals to a Z-domain and wherein the frequency information is contained in at least one zero or pole in the Z-domain.
Dependencies are inferred from the claim text.