Susceptor with built-in plasma generation electrode and manufacturing method therefor

A manufacturing method for a susceptor with a built-in plasma generation electrode comprising the steps of:

• forming a mounting plate on which a plate specimen is mounted and a support plate that supports said mounting plate using ceramics;
• then, forming an open hole in said support plate and inserting and fixing a power supply terminal into the open hole;
• then, coating with a first electrode coating material containing conductive powder on one principal plane of said support plate so as to make contact with said power supply terminal to form a first plasma generation electrode forming layer;
• then, coating with a second electrode coating material containing conductive powder with a higher resistance than said first electrode coating material in the regions on the principal plane of said support plate excluding said first plasma generation electrode forming layer, to form a second plasma generation electrode forming layer with a higher resistance than said first plasma generation electrode forming layer;
• and
• then, superposing said mounting plate onto said support plate via said first and second plasma generation electrode forming layers, heat treating under pressure to form a plasma generation electrode having a low resistance region and a high resistance region between said support plate and said mounting plate, and joining and unifying them.

A manufacturing method for a susceptor with a built-in plasma generation electrode comprising the steps of:

• manufacturing a mounting plate green body on which a plate specimen is mounted and a support plate green body that supports said mounting plate using a slurry containing ceramic powder;
• then, forming an open hole in said support plate green body, and packing power supply forming material containing conductive powder, or inserting a power supply terminal, into this open hole;
• then, coating with a first electrode coating material containing conductive powder on one principal plane of said support plate green body so as to make contact with said power supply forming material or said power supply terminal to form a first plasma generation electrode forming layer;
• then, coating with a second electrode coating material containing conductive powder with a higher resistance than said first electrode coating material in the regions on the principal plane of said support plate green body excluding said first plasma generation electrode forming layer, to form a second plasma generation electrode forming layer with a higher resistance than said first plasma generation electrode forming layer;
• then, superposing said mounting plate green body onto said support plate green body via said first and second plasma generation electrode forming layers, and heat treating under pressure to form a plasma generation electrode having a low resistance region and a high resistance region between said support plate and said mounting plate, formed from ceramics, and joining and unifying them.