Vapor jet pump with ejector stage in foreline
AssigneeVarian, Inc.
InventorMarsbed Hablanian
Life of this patent
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Abstract
A vapor jet vacuum pump includes a housing having an inlet port and a foreline conduit, a vapor jet assembly within the housing, a vapor source for supplying a vapor to the vapor jet assembly, and at least one ejector stage. The ejector stage includes an ejector nozzle mounted in the foreline conduit and a fluid inlet located external to the housing and coupled by an ejector conduit to the ejector nozzle. The fluid inlet may be an air inlet for drawing in air at atmospheric pressure. The ejector stage may be driven by a backing pump coupled to the foreline conduit.
Claims18
In a vapor jet vacuum pump comprising a housing having an inlet port and a foreline conduit, a vapor jet assembly within the housing and a vapor source for supplying a vapor to the vapor jet assembly, a method comprising:
- operating an ejector stage, including an ejector nozzle mounted in the foreline conduit and a fluid inlet located external to the housing and coupled by an ejector conduit to the ejector nozzle, by causing fluid supplied with an atmospheric air to flow through the fluid inlet, the ejector conduit and the ejector nozzle.
A vapor jet vacuum pump comprising:
- a housing having an inlet port and a foreline conduit;
- a vapor jet assembly within the housing;
- a vapor source for supplying a vapor to said vapor jet assembly;
- and
- an ejector stage including an ejector nozzle mounted in the foreline conduit and a fluid inlet having an air inlet, said fluid inlet located external to the housing and coupled by an ejector conduit to the ejector nozzle, wherein the ejector stage is driven by a backing pump coupled to the foreline conduit.
A vacuum pumping system comprising:
- a vapor jet pump comprising a housing having an inlet port and a foreline conduit, a vapor jet assembly within the housing, a vapor source for supplying a vapor to the vapor jet assembly, and an ejector stage including an ejector nozzle mounted in the foreline conduit and a fluid inlet, said fluid inlet comprising an air inlet and located external to the housing and coupled by an ejector conduit to the ejector nozzle;
- and
- a backing pump coupled to the foreline conduit.
Dependencies are inferred from the claim text.