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US 6,767,128 B1Granted
Electromagnetic wave sensor
AssigneeCentre National de la Recherche Scientifique (CNRS)
InventorsArmelle Daulle, Jacques Richard, Pascal Xavier, Dominique Rauly
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Abstract
The invention concerns a sensor for direct measurement of electromagnetic power, comprising a guiding structure (2) for bringing the power, a dissipative charge (3) and a thermometer. The invention is characterized in that the charge (3) and the thermometer are formed by a single element.
Claims8
A sensor for the direct measurement of electromagnetic power, comprising:
- a guiding structure into which the electromagnetic power is injected;
- a dissipative load directly coupled to the guiding structure and positioned to receive the electromagnetic power from the guiding structure;
- and
- a thermometer formed with the load as a single element and configured to measure a current temperature of the load,
- wherein a transition between the guiding structure and the load is made with the load having a pointed profile, and with the guiding structure having a reverse pointed profile receiving the pointed profile of the load, and
- wherein the current temperature of the load is directly correlated to a current amount of electromagnetic power received by the load.
3 more elements
A device for measuring electromagnetic power, comprising:
- a sensor for the direct measurement of electromagnetic power, the sensor comprising a guiding structure for receiving the electromagnetic power that is injected into the device, a dissipative load that is directly coupled to the guiding structure, and a thermometer that is formed with the load as a single element and that is configured to measure a current temperature of the load,
- wherein the single element has a first pointed profile received in a second pointed profile of the guiding structure, and wherein the current temperature of the load is correlated to a current amount of electromagnetic power received by the load.
A process for manufacturing a sensor for the direct measurement of electromagnetic power, comprising:
- forming a substrate;
- forming a guiding structure for receiving the electromagnetic power that is injected into the sensor, the guiding structure being formed on a top surface of the substrate, the guiding structure having a first pointed profile;
- and
- forming a single element corresponding to a dissipative load and a thermometer on a same plane as the guiding structure on the top surface of the substrate, the single element having a second pointed profile received in the first pointed profile, the single element being directly coupled to of the guiding structure,
- wherein the thermometer is configured to measure a current temperature of the load so as to determine a current amount of electromagnetic power received by the load.
2 more elements
Dependencies are inferred from the claim text.