Back to results
US 6,764,770 B2Granted
Buffer layers and articles for electronic devices
AssigneeUT-Battelle, LLC
InventorsMariappan P. Paranthaman, Tolga Aytug, David K. Christen, Roeland Feenstra, Amit Goyal
Life of this patent
Estimating the term…
Abstract
Materials for depositing buffer layers on biaxially textured and untextured metallic and metal oxide substrates for use in the manufacture of superconducting and other electronic articles comprise RMnO3, R1−xAxMnO3, and combinations thereof; wherein R includes an element selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A includes an element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra.
Claims22
A buffered substrate for electronic devices comprising:
- a. A substrate selected from the group consisting of biaxially textured metals, biaxially textured metal alloys, and biaxially textured metal oxides, said substrate having at least one surface;
- and
- b. a buffer layer disposed epitaxially upon a surface of said substrate, said buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra.
A buffered substrate for electronic devices comprising:
- a. A substrate selected from the group consisting of biaxially textured metals, biaxially textured metal alloys, and biaxially textured metal oxides, said substrate having at least one surface;
- b. At least one biaxially textured buffer layer disposed epitaxially upon a surface of said substrate;
- and
- c. an additional buffer layer disposed epitaxially upon a surface of said biaxially textured buffer layer, said additional buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra.
1 more element
A buffered substrate for electronic devices comprising:
- a. A substrate selected from the group consisting of metals and metal alloys, said substrate having a surface characterized by non-biaxial texture;
- b. At least one biaxially textured buffer layer disposed upon a surface of said substrate;
- and
- c. an additional buffer layer disposed epitaxially upon a surface of said biaxially textured buffer layer, said additional buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra.
1 more element
A buffered substrate for electronic devices comprising:
- a. A single crystal substrate, said substrate having at least one surface;
- and
- b. a buffer layer disposed epitaxially upon a surface of said single crystal substrate, said buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra.
An electronic device comprising:
- a. A substrate selected from the group consisting of biaxially textured metals, biaxially textured metal alloys, and biaxially textured metal oxides, said substrate having at least one surface;
- b. a buffer layer disposed epitaxially upon a surface of said substrate, said buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra;
- and,
- c. At least one electronic device disposed upon a surface of said buffer layer, said electronic device being selected from the group consisting of REBa2Cu3O7, a superconductor, a semiconductor, and a ferroelectric material.
1 more element
An electronic device comprising:
- a. A substrate selected from the group consisting of biaxially textured metals, biaxially textured metal alloys, and biaxially textured metal oxides, the said substrate having at least one surface;
- b. At least one biaxially textured buffer layer disposed epitaxially upon a surface of said substrate;
- c. an additional buffer layer disposed epitaxially upon a surface of said biaxially textured buffer layer, said additional buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra;
- and,
- d. At least one electronic device disposed upon a surface of said additional buffer layer, said electronic device being selected from the group consisting of REBa2Cu3O7, a superconductor, a semiconductor, and a ferroelectric material.
2 more elements
An electronic device comprising:
- a. A substrate selected from the group consisting of metals and metal alloys, said substrate having a surface characterized by non-biaxial texture;
- b. At least one biaxially textured buffer layer disposed upon a surface of said substrate;
- c. an additional buffer layer disposed epitaxially upon a surface of said biaxially textured buffer layer, said additional buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra;
- and,
- d. At least one electronic device disposed upon a surface of said additional buffer layer, said electronic device being selected from the group consisting of REBa2Cu3O7, a superconductor, a semiconductor, and a ferroelectric material.
2 more elements
An electronic device comprising:
- a. A single crystal substrate, said substrate having at least one surface;
- b. a buffer layer disposed epitaxially upon a surface of said single crystal substrate, said buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra;
- and,
- c. At least one electronic device disposed upon a surface of said buffer layer, said electronic device being selected from the group consisting of REBa2Cu3O7, a superconductor, a semiconductor, and a ferroelectric material.
1 more element
A buffered substrate for electronic devices comprising:
- a. A substrate selected from the group consisting of biaxially textured metals, biaxially textured metal alloys, and biaxially textured metal oxides, said substrate having at least one surface;
- and
- b. a buffer layer of La1−xAxMnO3 disposed epitaxially upon a surface of said substrate, wherein A comprises at least one element selected from the group consisting of Be, Mg, and Ra.
A buffered substrate for electronic devices comprising:
- a. A substrate selected from the group consisting of biaxially textured metals, biaxially textured metal alloys, and biaxially textured metal oxides, said substrate having at least one surface;
- b. At least one biaxially textured buffer layer disposed epitaxially upon a surface of said substrate;
- and
- c. an additional buffer layer of La1−xAxMnO3 disposed epitaxially upon a surface of said biaxially textured buffer layer, wherein A comprises at least one element selected from the group consisting of Be, Mg, and Ra.
1 more element
A buffered substrate for electronic devices comprising:
- a. A substrate selected from the group consisting of metals and metal alloys, said substrate having a surface characterized by non-biaxial texture;
- b. At least one biaxially textured buffer layer disposed upon a surface of said substrate;
- and
- c. a buffer layer of La1−xAxMnO3 disposed epitaxially upon a surface of said substrate wherein A comprises at least one element selected from the group consisting of Be, Mg, and Ra.
1 more element
A buffered substrate for electronic devices comprising:
- a. A single crystal substrate, said substrate having at least one surface;
- and
- b. a buffer layer of La1−xAxMnO3 disposed epitaxially upon a surface of said single crystal substrate, wherein A comprises at least one element selected from the group consisting of Be, Mg, and Ra.
An electronic device comprising:
- a. A substrate selected from the group consisting of biaxially textured metals, biaxially textured metal alloys, and biaxially textured metal oxides, said substrate having at least one surface;
- b. a buffer layer of La1−xAxMnO3 disposed epitaxially upon a surface of said substrate, wherein A comprises at least one element selected from the group consisting of Be, Mg, and Ra;
- and,
- c. At least one electronic device disposed upon a surface of said buffer layer, said electronic device being selected from the group consisting of REBa2Cu3O7, a superconductor, a semiconductor, and a ferroelectric material.
1 more element
An electronic device comprising:
- a. A substrate selected from the group consisting of biaxially textured metals, biaxially textured metal alloys, and biaxially textured metal oxides, said substrate having at least one surface;
- b. At least one biaxially textured buffer layer disposed epitaxially upon a surface of said substrate;
- c. an additional buffer layer of La1−xAxMnO3 disposed epitaxially upon a surface of said biaxially textured buffer layer, wherein A comprises at least one element selected from the group consisting of Be, Mg, and Ra;
- and,
- d. At least one electronic device disposed upon a surface of said additional buffer layer, said electronic device being selected from the group consisting of REBa2Cu3O7, a superconductor, a semiconductor, and a ferroelectric material.
2 more elements
An electronic device comprising:
- a. A substrate selected from the group consisting of metals and meal alloys, said substrate having a surface characterized by non-biaxial texture;
- b. At least one biaxially textured buffer layer disposed upon a surface of said substrate;
- c. a buffer layer of La1−xAxMnO3 disposed epitaxially upon a surface of said substrate, wherein A comprises at least one element selected from the group consisting of Be, Mg, and Ra;
- and,
- d. At least one electronic device disposed upon a surface of said additional buffer layer, said electronic device being selected from the group consisting of REBa2Cu3O7, a superconductor, a semiconductor, and a ferroelectric material.
2 more elements
An electronic device comprising:
- a. A single crystal substrate, said substrate having at least one surface;
- b. a buffer layer of La1−xAxMnO3 disposed epitaxially upon a surface of said single crystal substrate, wherein A comprises at least one element selected from the group consisting of Be, Mg, and Ra;
- and,
- c. At least one electronic device disposed upon a surface of said buffer layer, said electronic device being selected from the group consisting of REBa2Cu3O7, a superconductor, a semiconductor, and a ferroelectric material.
1 more element
A buffered substrate for electronic devices comprising:
- a. A substrate selected from the group consisting of biaxially textured metals, biaxially textured metal alloys, and biaxially textured metal oxides, said substrate having at least one surface;
- b. At least one biaxially textured MgO buffer layer disposed epitaxially upon a surface of said substrate;
- and
- c. an additional buffer layer disposed epitaxially upon a surface of said biaxially textured buffer layer, said additional buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, when R comprises at least one element selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra.
1 more element
A buffered substrate for electronic devices comprising:
- a. A substrate selected from the group consisting of metals and metal alloys, said substrate having a surface characterized by non-biaxial texture;
- b. At least one biaxially textured MgO buffer layer disposed upon a surface of said substrate;
- and
- c. an additional buffer layer disposed epitaxially upon a surface of said biaxially textured buffer layer, said additional buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra.
1 more element
A buffered substrate for electronic devices comprising:
- a. A single crystal MgO substrate, said substrate having at least one surface;
- and
- b. a buffer layer disposed epitaxially upon a surface of said single crystal substrate, said buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra.
An electronic device comprising;
- a. A substrate selected from the group consisting of biaxially textured metals, biaxially textured metal alloys, and biaxially textured metal oxides, said substrate having at least one surface;
- b. At least one biaxially textured MgO buffer layer disposed epitaxially upon a surface of said substrate;
- c. an additional buffer layer disposed epitaxially upon a surface of said biaxially textured buffer layer, said additional buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra;
- and,
- d. At least one electronic device disposed upon a surface of said additional buffer layer, said electronic device being selected from the group consisting of REBa2Cu3O7, a superconductor, a semiconductor, and a ferroelectric material.
2 more elements
An electronic device comprising:
- a. A substrate selected from the group consisting of metals and metal alloys, said substrate having a surface characterized by non-biaxial texture;
- b. At leas one biaxially textured MgO buffer layer disposed upon a surface of said substrate;
- c. an additional buffer layer disposed epitaxially upon a surface of said biaxially textured buffer layer, said additional buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra;
- and,
- d. At least one electronic device disposed upon a surface of said additional buffer layer, said electronic device being selected from the group consisting of REBa2Cu3O7, a superconductor, a semiconductor, and a ferroelectric material.
2 more elements
An electronic device comprising;
- a. A single crystal MgO substrate, said substrate having at least one surface;
- b. a buffer layer disposed epitaxially upon a surface of said single crystal substrate, said buffer layer comprising at least one buffer selected from the group consisting of RMnO3 and R1−xAxMnO3, wherein R comprises at least one element selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Y, and A comprises at least one element selected from the group consisting of Be, Mg, Ca, Sr, Ba, and Ra;
- and,
- c. At least one electronic device disposed upon a surface of said buffer layer, said electronic device being selected from the group consisting of REBa2Cu3O7, a superconductor, a semiconductor, and a ferroelectric material.
1 more element
Dependencies are inferred from the claim text.