Carbon nanobimorph actuator and sensor
AssigneeCalifornia Institute of Technology
InventorsBrian D. Hunt, Flavio Noca, Michael E. Hoenk
Life of this patent
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Abstract
A nanomechanical actuator/oscillator device and system are provided. The nanomechanical actuator/oscillator device comprising nanobimorphs, such as nanotubes, designed such that inducing a difference in charge density between the tubes (e.g. by biasing one tube positive with respect to the other with sufficient tube-to-tube contact resistance) induces lateral movement in the end of the bimorph, forming a nanoscale resonator, as well as a force sensor when operated in an inverse mode. A method of producing a novel nanobimorph structure with integrated electrodes is also provided.
Claims39
A nanomechanical device comprising:
- a power device comprising at least one of a power emitter and a power detector;
- a substrate;
- and at least one self-assembled nanobimorph in signal communication with the power device wherein each nanobimorph comprises at least two adjacent nanofeatures having proximal and distal ends, wherein the proximal ends of the nanofeatures are spaced apart and fixedly attached to the substrate and wherein the distal ends of the nanofeatures are attractively coupled such that a potential applied to the nanobimorph by the power device induces lateral motion in the nanobimorph and such that motion of the nanobimorph induces a voltage or current measurable by the power device.
A nanomechanical device comprising:
- a power detector;
- a substrate;
- and at least one self-assembled nanobimorph in signal communication with the power detector wherein each nanobimorph comprises at least two adjacent nanofeatures having proximal and distal ends, wherein the proximal ends of the nanofeatures are spaced apart and fixedly attached to the substrate and wherein the distal ends of the nanofeatures are attractively coupled such that motion of the nanobimorph induces a voltage or current measurable by the power detector.
A method of detecting a molecule in a sample comprising the steps of:
- providing a nanomechanical device comprising a power detector, a substrate, and at least one self-assembled nanobimorph in signal communication with the power detector wherein each nanobimorph comprises two adjacent nanofeatures having proximal and distal ends, wherein the proximal ends of the nanofeatures are spaced apart and fixedly attached to the substrate and wherein the distal ends of the nanofeatures are attractively coupled such that motion of the nanobimorph induces a potential measurable by the power detector;
- introducing the sample into proximity of the nanomechanical device;
- measuring the potential on the bimorph and communicating the potential to a user.
Dependencies are inferred from the claim text.