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US 6,752,966 B1Granted
Microfabrication methods and devices
AssigneeCaliper Life Sciences, Inc.
InventorDavid Chazan
Life of this patent
Estimating the term…
Abstract
Microfabrication methods and devices in which microscale structural elements are provided in an intermediate polymer layer between two planar substrates. Preferred aspects utilize photoimagable or ablatable polymer layers as the intermediate polymer layer.
Claims61
A method of manufacturing a microfabricated channel network, comprising:
- providing a first planar substrate having a first surface;
- depositing a first polymer layer on the first surfice of the first substrate;
- removing a first portion of the polymer layer to expose an area of the first surface of the first substrate, rcmoval of the first portion of the polymer layer providing one or more grooves in the polymer layer that correspond to a desired channel pattern;
- and
- overlaying a second planar substrate layer on the polymer layer to seal the one or more grooves in the polymer layer as one or more channels in the desired channel pattern.
2 more elements
A microfluidic device, comprising:
- a first substrate layer having a first surface;
- a first photoimagable polymer layer on the first surface of the first substrate, the photoimagable polymer layer having at least a first groove disposed therein in a desired location;
- and
- a second planar substrate layer having a first surface, the first surface of the second substrate layer mated with and overlaying the photoimagable polymer layer.
1 more element
A microfluidic device, comprising:
- a first non-ablatable substrate layer having a first surface;
- a first ablatable polymer layer on the first surface of the first substrate, the polymer layer having at least a first groove laser ablated entirely through the polymer layer in a desired location without affecting the first surface of the first substrate;
- and
- a second planar substrate layer having a first surface, the first surface of the second substrate layer mated with and overlaying the first ablatable polymer layer.
1 more element
An analytical system, comprising:
- a microfluidic device, comprising:
- a first substrate layer having a first surface;
- a first photoimagable polymer layer on the first surface of the first substrate, the photoimagable polymer layer having one or more grooves disposed therein in a desired location;
- and
- a second planar substrate layer having a first surface, the first surface of the second substrate layer mated with and overlaying tbe photoimagable polymer layer sealing the one or more grooves to define one or more microscale channels;
- a material transport system for directing movement of material through the one or more microscale channels, and
- a detector for detecting signals from the material.
4 more elements
Dependencies are inferred from the claim text.