Quartz oscillator and method for manufacturing the same
AssigneeHumo Laboratory, Ltd.
InventorsNaoyuki Takahashi, Takato Nakamura, Satoshi Nonaka, Hiromi Yagi, Yoichi Shinriki, Katsumi Tamanuki
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Abstract
A quartz oscillator includes a base, a quartz thin-film formed on the base by epitaxial growth, a vibrating reed portion formed by processing the quartz thin-film, and excitation electrodes for vibrating the vibrating reed portion. At least one of the excitation electrodes may be formed by depositing a metal. The material for the base may include a single-element semiconductor, a compound semiconductor, and an oxide. When a semiconductor is used for the base, a semiconductor circuit may be provided to the base to form a module including a quartz oscillator.
Claims11
A quartz oscillator comprising:
- a base having a crystal face;
- a quartz thin-film formed on the face of the base by epitaxial growth under atmospheric pressure;
- a vibrating reed portion formed by processing the quartz thin-film;
- and
- excitation electrodes for exciting the vibrating reed portion.
A method for manufacturing a quartz oscillator comprising the steps of:
- preparing a crystalline wafer for a base;
- epitaxially growing a quartz thin-film on the base;
- forming a vibrating reed portion by processing the quartz thin-film and the base;
- and
- providing excitation electrodes for exciting the vibrating reed portion.
Dependencies are inferred from the claim text.