Observation apparatus and observation method using an electron beam

An observation method using an electron beam, comprising:

• a step of mounting a specimen on a specimen stage;
• a step of irradiating a first area in said specimen with an electron beam while scanning the electron beam and detecting a first diffraction image formed by an electron beam diffracted in said specimen by a pixel detector;
• a step of irradiating a second area in said specimen with said electron beam while scanning the electron beam and detecting a second diffraction image formed by the electron beam diffracted in said specimen by using said pixel detector;
• a step of irradiating a third area including said first and second areas with said electron beam and detecting an enlarged image observed simultaneously with said first diffraction image or said second diffraction image formed by an electron beam passed through said specimen by a second detector;
• and
• a step of obtaining a characteristic value of a crystal structure in said first and second areas in said specimen on the basis of the detected information of said first and second diffraction images from said pixel detector.

An observation method using an electron beam, comprising:

• a step of mounting a specimen on a specimen stage;
• a step of irradiating a first area in said specimen with an electron beam converged to be narrow and detecting a first diffraction image formed by an electron beam diffracted in said specimen by a first detector;
• a step of irradiating a second area in a second area in said specimen with said electron beam converged to be narrow and detecting a second diffraction image formed by the electron beam diffracted in said specimen by said first detector;
• a step of irradiating a third area including said first and second areas in said specimen with said electron beam and acquiring an enlarged image of said third area in said specimen observed simultaneously with said first diffraction image or said second diffraction image;
• a step of obtaining a characteristic value of a crystal structure in said first and second areas in said specimen on the basis of the detected information of said first and second diffraction images from said first detector;
• and
• a step of displaying said characteristic value so as to be superimposed on said enlarged image.