US 6,748,288 B2 · Semiconductor wafer manufacturing execution system with recipe distribution management database

Abstract

A semiconductor manufacturing execution system (MES) is disclosed, including a memory module, a comparing module, and an outputting module. The memory module stores a basic database and a recipe distribution management (RDM) database. The basic database includes multiple basic records, and the RDM database includes multiple RDM records. The comparing module compares operation data, received from a manufacturing machine, to each of the RDM records, and secondarily to each of the basic records, to determine whether the operation data matches at least one of the RDM and basic records. The outputting module outputs a limiting signal to the manufacturing machine if the operation data matches at least one of the RDM records. The limiting signal prevents the manufacturing machine from executing a process corresponding to the operation data. The outputting module may also output a first alarm signal to the manufacturing machine, and a second alarm signal to the user interface, if the operation data does not match at least one of the RDM and basic records. The semiconductor MES may also embody methods for adding new RDM records to the RDM database, editing RDM records in the RDM database, and/or deleting RDM records from the RDM database.

Claims20

Dependent claims

A semiconductor manufacturing execution system (MES) for automatically determining whether a given process can be executed on a process tool, comprising:

a memory module storing a recipe distribution management (RDM) database and a basic database, the RDM database comprising a plurality of RDM records each indicating that a given process cannot be executed on a process tool, and the basic database comprising a plurality of basic records each including information to facilitate automatic execution of a process of a process tool;
a comparing module adapted to receive from a manufacturing machine operation data, which corresponds to a process to be executed on a process tool, and to compare the operation data to the RDM records in order to determine whether a process corresponding to the operation data should not be executed and to the basic records in order to determine whether a process corresponding to the operation data can be executed normally;
and
an outputting module adapted to output a first limiting signal if the operation data matches at least one of the RDM records, the first limiting signal preventing execution on a process tool of a process corresponding to the operation data.

1 more element

A semiconductor manufacturing execution method for automatically determining whether a given process can be executed on a process tool, comprising:

receiving operation data from a manufacturing machine, the operation data corresponding to a process to be executed on a process tool;
comparing the operation data to a plurality of recipe distribution management (RDM) records to determine if the operation data matches any of the RDM records, each of the RDM records indicating that a given process cannot be executed on a process tool;
if the operation data does not match any of the RDM records, comparing the operation data to a plurality of basic records to determine if the operation data matches any of the basic records, each of the basic records including information to facilitate automatic execution of a process on a process tool;
and
outputting a signal, based upon the comparing of the operation data to the RDM records and the basic records, wherein the signal prevents execution on a process tool of a process corresponding to the operation data if the operation data matches at least one of the RDM records.

2 more elements

A fabrication system for automatically determining whether a given process can be executed on a process tool comprising:

a manufacturing machine;
a manufacturing execution system (MES) including a comparing module, a basic database having first records and a second database having second records, wherein the second database is adapted to be easily modified;
a first interface operably coupled between the manufacturing machine and the MES, wherein the MES is adapted to receive operation data from the manufacturing machine via the first interface and to provide first signals to the manufacturing machine via the first interface, the operation data corresponding to a process to be executed on a process tool;
a second interface operably coupled to the MES, wherein the MES is adapted to provide second signals to a user via the second interface;
and
wherein the comparing module is adapted to compare the operation data to the second records, and if the operation data matches at least one of the second records, the MES is adapted to generate at least one limiting signal to thereby prevent execution on a process tool of a process corresponding to the operation data.

3 more elements

Dependencies are inferred from the claim text.

Semiconductor wafer manufacturing execution system with recipe distribution management database

Life of this patent

Semiconductor wafer manufacturing execution system with recipe distribution management database

Life of this patent

Abstract

Claims20