Method for controlling light beam using adaptive micro-lens
AssigneeCreo Inc.
InventorDaniel Gelbart
Life of this patent
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Abstract
Individual elements in a micro-electromechanical array of integrated stretched membrane devices are independently addressed and controlled to produce independently controlled degrees of refraction of light beams.
Claims63
A method for varying a direction of a light beam passing through a micro-machined device, said method comprising
- directing said light beam through a transparent membrane separating two refractive regions, each of said refractive regions comprising a fluid with a different refractive index, said membrane being attached at its perimeter to a fixed member;
- and,
- inducing a deformation of said membrane, thereby increasing a thickness of a first one of said refractive regions and correspondingly decreasing a thickness of a second one of said refractive regions.
An adaptive lens in a micro-machined device, said adaptive lens comprising a deformable transparent membrane separating two refractive regions, each of said refractive regions comprising a fluid with a different refractive index, wherein an amount of deformation of said transparent membrane determines an amount of refraction caused to a light beam transmitted by said adaptive lens.
An adaptive lens within a micro-machined device, said adaptive lens comprising of a transparent membrane attached at its perimeter to a fixed member and
- a. said membrane separating two refractive regions of differing refractive index, and
- b. said membrane being capable of changing its curvature in response to an electrical control signal, the degree of refraction of said adaptive lens being controlled by said curvature.
A micro-electromechanical adaptive lens comprising a deformable transparent membrane attached at its perimeter to a substrate, wherein an amount of deformation of the membrane determines an amount of refraction of a light beam transmitted through the adaptive lens, wherein the membrane extends over a cavity in the substrate and, when deformed, the membrane curves into the cavity.
A micro-electromechanical adaptive lens comprising a deformable transparent membrane attached at its perimeter to a substrate, wherein an amount of deformation of the membrane determines an amount of refraction of a light beam transmitted through the adaptive lens, wherein the membrane is under tensile stress.
A micro-electromechanical adaptive lens comprising a deformable transparent membrane attached at its perimeter to a substrate, wherein an amount of deformation of the membrane determines an amount of refraction of a light beam transmitted through the adaptive lens, wherein the perimeter of the membrane is substantially circular.
A plurality of substantially similar micro-electromechanical adaptive lenses each comprising a deformable transparent membrane attached at its perimeter to a substrate, wherein an amount of deformation of the membrane determines an amount of refraction of a light beam transmitted through the adaptive lens, each one of the adaptive lenses fabricated in a single substrate and comprising an independently deformable transparent membrane.
A micro-electromechanical adaptive lens comprising a deformable transparent membrane attached at its perimeter to a substrate, wherein an amount of deformation of the membrane determines an amount of refraction of a light beam transmitted through the adaptive lens, wherein the membrane separates a first region and a second region, each of the first and second regions comprising a fluid having a different refractive index.
A micro-electromechanical adaptive lens comprising a deformable transparent membrane attached at its perimeter to a substrate, wherein an amount of deformation of the membrane determines an amount of refraction of a light beam transmitted through the adaptive lens, comprising an electrode located in a vicinity of the membrane, wherein the amount of deformation of the membrane is determined by an electric field applied between the electrode and the membrane.
A method for varying an amount of refraction of a light beam transmitted by a micro-electromechanical adaptive lens, the method comprising:
- providing a deformable transparent membrane, attached at its perimeter to a substrate;
- and
- inducing a deformation of the membrane, wherein an amount of the deformation of the membrane determines the amount of refraction of the light beam transmitted by the adaptive lens, wherein inducing a deformation of the membrane comprises curving the membrane into a cavity formed in the substrate.
A method for varying an amount of refraction of a light beam transmitted by a micro-electromechanical adaptive lens, the method comprising:
- providing a deformable transparent membrane, attached at its perimeter to a substrate;
- and
- inducing a deformation of the membrane, wherein an amount of the deformation of the membrane determines the amount of refraction of the light beam transmitted by the adaptive lens, comprising maintaining the membrane under tensile stress.
A method for varying an amount of refraction of a light beam transmitted by a micro-electromechanical adaptive lens, the method comprising:
- providing a deformable transparent membrane, attached at its perimeter to a substrate;
- and
- inducing a deformation of the membrane, wherein an amount of the deformation of the membrane determines the amount of refraction of the light beam transmitted by the adaptive lens, wherein the membrane separates a first region and a second region, each of which comprises a fluid with a different refractive index, and wherein deforming the membrane comprises decreasing a thickness of the second region.
A method for varying an amount of refraction of a light beam transmitted by a micro-electromechanical adaptive lens, the method comprising:
- providing a deformable transparent membrane, attached at its perimeter to a substrate;
- and
- inducing a deformation of the membrane, wherein an amount of the deformation of the membrane determine the amount of refraction of the light beam transmitted by the adaptive lens, wherein inducing a deformation of the membrane comprises applying an electrostatic force to the membrane.
An adaptive lens comprising a deformable transparent membrane spaced apart from a transparent base and a transparent liquid having an index of refraction different from that of a fluid on a side of the membrane away from the base, the liquid located between the membrane and the base.
Dependencies are inferred from the claim text.