An optically functional device comprising a ferroelectric single crystal substrate and polarization-inverted structures formed at portions of the substrate at a temperature of not higher than the Curie temperature by an electron beam scanning irradiation method or a voltage application method and designed to control light passed through the polarization-inverted portions, wherein a LiNbO3 crystal having a molar ratio of Li/Nb within a range of from 0.95 to 1.01, is used as the substrate, so that the propagation loss of light passed through the polarization-inverted portions immediately after formation of the polarization-inverted structures, is not more than 2%, wherein the ferroelectric single crystal substrate is made of a LiNbO3 crystal having a molar ratio of Li/Nb within a range of from 0.95 to 1.00 and containing from 0.1 to 4.8 mol % of at least one element selected from the group consisting of Mg, Zn, Sc and In, as doped.