US 6,747,785 B2 · MEMS-actuated color light modulator and methods

Abstract

A light modulator has one or more gratings and one or more MEMS actuators operable to move the gratings for selectively modulating light from an input light source. Certain embodiments have a plurality of blazed gratings arranged parallel to a plane and movable linearly parallel to the plane by MEMS actuators. Each of the gratings is individually blazed for light of a selected color such as red, green or blue. Associated with the gratings may be portions providing black and/or white outputs. An aperture spaced apart from the plane allows color(s) selected from an input white-light source to be directed to an output. An array of MEMS-actuated modulation devices provides a color spatial light modulator. Other embodiments have a grating adapted to be tilted by a MEMS actuator, either continuously through a range of angles or to a selected angle of a set of predetermined discrete angles, to direct selected wavelengths diffracted by the grating toward collection optics for a modulated light output. Methods specially adapted for making and using such light modulators are disclosed.

Claims16

Dependent claims

A light modulator for modulating light from a source, said light modulator comprising:

one or more blazed gratings disposed to be illuminated by said light from said source, said one or more blazed gratings being disposed substantially parallel to a first plane,
at least one aperture movably disposed in a second plane, and
at least one MEMS actuator adapted to move said at least one aperture substantially parallel to said second plane to selectively direct light diffracted by said one or more blazed gratings through said at least one aperture.

Dependencies are inferred from the claim text.

MEMS-actuated color light modulator and methods

Life of this patent

MEMS-actuated color light modulator and methods

Life of this patent

Abstract

Claims16