Substrate testing apparatus and substrate testing method

The substrate testing apparatus comprising:

• a first rail group made of a plurality of rails disposed in parallel with each other;
• a second rail group made of a plurality of rails disposed in parallel with each other in a direction that crosses said first rail group;
• a plurality of probe units disposed to cover respective intersections of the rails included in said first rail group and the rails included in said second rail group, all of said probe units being concurrently movable along the rails included in said first rail group and said second rail group, wherein said plurality of probe units each comprise a probing needle to be brought into contact with a surface of said substrate;
• corresponding interval maintaining means for keeping each rail included in said first rail group at an interval corresponding to an arrangement of locations to be measured on a substrate subjected to measurement,
• displacement measuring means for measuring a displacement of one or more observation points on the substrate subjected to measurement;
• and
• displacement measurement value feedback means for setting the interval of each rail included in said first rail group, as defined by said equal interval maintaining means, in accordance with a displacement measurement value given by said displacement measuring means,
• wherein said corresponding interval maintaining means comprises equal interval maintaining means for keeping each rail included in said first rail group at an equal interval.

A substrate testing apparatus comprising:

• a first rail group made of a plurality of rails disposed in parallel with each other;
• a second rail group made of plurality of rails disposed in parallel with each other in a direction that crosses said first rail group;
• a plurality of probe units disposed to cover respective intersections of the rails included in said first rail group and the rails included in said second rail group, all of said probe units being concurrently movable along the rails included in said first rail group and said second rail group, wherein said plurality of probe units each comprise a probing needle to be brought into contact with a surface of said substrate;
• corresponding interval maintaining means for keeping each rail included in said first rail group at an interval corresponding to an arrangement of location to be measured on a substrate subjected to measurement,
• temperature measuring means for measuring a temperature;
• and
• temperature measurement value feedback means for setting the interval of each rail included in said first rail group, as defined by said equal interval maintaining means, in accordance with a temperature measurement value given by said temperature measuring means,
• wherein said corresponding interval maintaining means comprises equal interval maintaining means for keeping each rail included in said first rail group at an equal interval.