Contractor, method for manufacturing the same, and probe card using the same
AssigneesTokyo Electron Limited, Masayoshi Esashi
InventorsMasayoshi Esashi, Shinji Iino, Tomohisa Hoshino
Life of this patent
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Abstract
There is disclosed a contactor which is used for testing electric characteristics of an object to be tested, the contactor comprising a contactor board, a plurality of conductive members formed through the contactor board, a plurality of beam members, and a contact terminal provided at the tip of each beam member. In this contactor, each beam member has a tip and a base end at its both ends, and has a step shape or an arch shape between the tip and the base end. The base end of each beam member is connected to each conductive member. The contact terminal member can be formed integrally with a conductive layer of the beam member.
Claims18
A contactor which is used for testing electric characteristics of an object to be tested, said contactor comprising:
- a contactor board;
- a plurality of conductive members formed through the contactor board;
- a plurality of beam members each having a tip end and a base end at its both ends in which one end of the base end is fixed to the conductive member of the contactor board, at least a conductive layer is provided between both the ends, and each beam member has a step, which is separated from the contactor board between the tip end and the base end;
- and
- a contact terminal member provided at the tip end of each beam member in which the contact terminal member is formed integrally with the conductive layer of the beam member.
A contactor which is used to test electric characteristics of an object to be tested, comprising:
- a contactor board;
- at least one conductive member formed through the contactor board;
- at least one beam member, which has one of a step shape and a slope shape and has a tip end and a base end, one end of the base end being fixed to the at least one conductive member of the contactor board, wherein in the beam member one of the step shape and the slope shape is separated from the contactor board between the tip end and the base end;
- and
- a contact terminal member provided at the tip end of the at least one beam member.
Dependencies are inferred from the claim text.