US 6,747,419 B2 · Method and apparatus for heat pipe cooling of an excimer lamp

Abstract

Embodiments of the present invention are directed to a method and apparatus for heat pipe cooling of an excimer lamp. In one embodiment, a heat pipe is used to dissipate heat from an excimer lamp. The heat pipe is in direct contact with at least one electrode of the excimer lamp. In one embodiment, heat is transferred through the heat pipe to a cooling point that is electrically isolated from the lamp. In one embodiment, dissipation of heat from the cooling point is done by conventional means. In one embodiment, the heat pipe is on the inside of the lamp. In another embodiment, a heat pipe is attached to the outside of an excimer lamp. In another embodiment, two heat pipes are used, one on the inside and one on the outside of an excimer lamp. In yet another embodiment, a heat pipe is used with a flat lamp.

Claims12

Dependent claims

A method of cooling an excimer lamp comprising:

connecting a heat pipe to an electrode of said excimer lamp;
transferring heat from said excimer lamp to said heat pipe;
evaporating a liquid to form a vapor in an evaporator of said heat pipe using said heat;
transporting said vapor to a condenser of said heat pipe;
condensing said vapor back into said liquid in said condenser, said act of condensing resulting in a release of heat at a cooling point;
and
transporting said liquid back to said evaporator through a wick.

4 more elements

Dependencies are inferred from the claim text.

Method and apparatus for heat pipe cooling of an excimer lamp

Life of this patent

Method and apparatus for heat pipe cooling of an excimer lamp

Life of this patent

Abstract

Claims12