Semiconductor sensor chip having diaphragm and method of manufacturing the same
AssigneeDenso Corporation
InventorsShinji Yoshihara, Yasutoshi Suzuki
Life of this patent
Estimating the term…
Abstract
A plularity of sensor chips, each having strain gauges and a thin diaphragm, are formed on a semiconductor wafer having an upper layer and a lower layer forming a P-N junction plane therebetween. The sensor chips are separated into individual pieces by dicing along column and row interstices dividing the sensor chips. Conductor lines for supplying an electrical voltage for electrochemically etching the diaphragms are formed on and along the interstices. All of the conductor lines are removed by a dicing blade having a wider width than the conductor lines to avoid electrical leakage due to particles of conductor lines leftover on side surfaces of the diced out sensor chips.
Claims4
A semiconductor sensor chip comprising:
- a semiconductor substrate having a front portion and a rear portion, the front portion and the rear portion having a different conductivity to form a P-N junction plane parallel to front and rear surfaces of the semiconductor substrate;
- a sensing element disposed in the front portion at a vicinity of the front surface of the semiconductor substrate;
- a diaphragm contoured by a cavity extending from the rear surface into the rear portion of the semiconductor substrate;
- and
- a diffused layer disposed on and along the P-N junction plane and exposed to a side surface of the semiconductor sensor chip, the diffused layer having a same conductivity type as the rear portion where the cavity is located and having an impurity density higher than an impurity density of the rear portion of the semiconductor substrate,
- wherein the diffused layer has a pattern for permitting the front and rear portions to directly contact each other at a position below the diaphragm, and wherein the diffused layer is a buried layer not exposed at the front surface of the front portion.
A semiconductor sensor chip comprising:
- a semiconductor substrate having a front portion and a rear portion, the front portion and the rear portion having a different conductivity to form a P-N junction plane parallel to front and rear surfaces of the semiconductor substrate;
- a sensing element disposed in the front portion at a vicinity of the front surface of the semiconductor substrate;
- a diaphragm contoured by a cavity extending from the rear surface into the rear portion of the semiconductor substrate;
- and
- a diffused layer disposed on and along the P-N junction plane and exposed to a side surface of the semiconductor sensor chip, the diffused layer having a same conductivity type as the rear portion where the cavity is located and having an impurity density higher than an impurity density of the rear portion of the semiconductor substrate,
- wherein corners of the cavity are rounded, and wherein the diffused layer is a buried layer not exposed at the front surface of the front portion.
Dependencies are inferred from the claim text.