Surface-channel metal-oxide semiconductor transistors, their complementary field-effect transistors and method of producing the same

A surface-channel MOS transistor comprising:

• a gate electrode formed on a semiconductor substrate having a sidewall-spacer on the sidewall thereof;
• source/drain regions having lightly doped drain/source (LDD) regions;
• and
• highly doped regions of a different conductivity type from that of the source/drain regions formed directly under the LDD regions and on a side of the source/drain regions;
• wherein the horizontal extension of the highly doped regions toward the channel is smaller than the horizontal extension of the LDD regions and the vertical extension of the highly doped regions is shallower than the source/drain regions, wherein a boundary of each highly doped region at the channel side terminates approximately at or underneath the gate, wherein a boundary of each source/drain region at the channel terminates approximately at or underneath the sidewall spacer, and a boundary of each LDD region extends toward the channel beyond a boundary of the gate end, and wherein the impurity concentration of the highly doped regions is higher than that of the semiconductor substrate.