System for performing thermal reflow operations under high gravity conditions
AssigneeMicron Technology, Inc.
InventorsKarl M. Robinson, David L. Chapek
Life of this patent
Estimating the term…
Abstract
A thermal reflow processing system has a rotatable structure to which articles having a reflowable surface are attached. The structure is coupled to a drive motor which causes the structure to rotate at speeds which generate centripetal forces in excess of that of gravity. The system is equipped with at least one radiant heat source. As the articles are being subjected to a centripetal force, the surface is heated by the radiant heat source.
Claims17
An apparatus for thermally processing a portion of a surface of an article comprising:
- a chamber having an axis of revolution, having at least one radius of revolution, having a shaft, having a removable lid, having an interior chamber wall, and having a mounting fixture attached to said interior chamber wall of said chamber for attaching said article having said portion of said surface for the thermal processing thereof, said article being attachable to said mounting fixture having said portion of said surface thereof positioned perpendicularly to said at least one radius of revolution of said chamber;
- a drive assembly connected to said shaft of said chamber for rotating said chamber;
- and
- a radiant heat source used to heat said portion of said surface of said article attached to said mounting fixture, said radiant heat source positioned between said article attached to said mounting fixture and said axis of revolution of said chamber.
An apparatus for thermally processing a portion of a surface of an article comprising:
- chamber apparatus having an axis of revolution, having at least one radius of revolution, having a shaft connected thereto, and having at least one mounting fixture attached to a portion of said article, said portion of said surface of said article positioned perpendicularly to said at least one radius of revolution of said chamber apparatus;
- a drive apparatus connected to said shaft of said chamber apparatus;
- and
- a radiant heat source centered about said axis of revolution of said chamber apparatus for heating said portion of said surface of said article.
An apparatus for thermally processing a portion of a surface of an article comprising:
- chamber apparatus having an axis of revolution, having a radius of revolution, having a shaft, and having at least one mounting location therein for mounting said article for the thermally processing said portion of said surface, said article mounted having said portion of said surface positioned facing said axis of revolution at said radius of revolution and mounted perpendicularly to said radius of revolution, said chamber apparatus comprising a hermetically sealable chamber;
- a drive assembly connected to said shaft of said chamber apparatus;
- and
- a radiant heat source used to heat said portion of said surface of said article mounted at said at least one mounting location.
A system for thermally processing a portion of a surface of an article comprising:
- a chamber having an axis of revolution, having a radius of revolution, having a shaft, and having at least one mounting location therein for mounting said article for thermally processing said portion of said surface thereof, said article for mounting having said portion of said surface positioned such that it faces said axis of revolution at said radius of revolution and for mounting perpendicularly to said radius of revolution, said chamber comprising a hermetically sealable rotatable chamber;
- a drive assembly connected to said shaft of said chamber for rotating said chamber;
- and
- a radiant heat source used to heat said portion of said surface of said article mounted at said at least one mounting location.
An apparatus for thermally processing a portion of a surface of an article comprising:
- a chamber having an axis of revolution, having a radius of revolution, having a shaft, and having at least one mounting location for mounting said article having said portion of said surface, said article for mounting having said portion of said surface to be positioned facing said axis of revolution at said radius of revolution of said chamber and for mounting perpendicularly to said radius of revolution, said chamber generating centripetal forces within a range of 10 to 1000 times a force of gravity at sea level;
- a drive apparatus connected to said shaft of said chamber for rotating said chamber;
- and
- a radiant heat source having an axis concentric with said axis of revolution for heating said portion of said surface of said article.
Dependencies are inferred from the claim text.