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US 6,746,956 B1Granted
Hermetic seal for silicon die with metal feed through structure
AssigneeNational Semiconductor Corporation
InventorsGobi R. Padmanabhan, Visvamohan Yegnashankaran
Life of this patent
Estimating the term…
Abstract
A semiconductor die is formed in a process that forms a trench opening in the semiconductor material prior to the formation of the contacts and the metal-1 layer. When contacts are then formed to contact circuit structures, such as a doped region in the top surface of the semiconductor material, a trench contact is formed that fills up the trench opening. During the final steps of the process, the back side of the semiconductor material is ground down to expose the trench contact. The wafer is cut to form a plurality of dice, and the exposed edges of the dice are protected.
Claims14
A semiconductor die comprising:
- a semiconductor structure having a first surface, an opposing second surface, and a plurality of side walls, each side wall being connected to the first and second surfaces, a center point lying on the second surface a distance from a first side wall and the distance from a second opposite sidewall;
- a doped region formed in the first surface of the semiconductor structure;
- a layer of insulation material formed on the first surface of the semiconductor structure, the layer of insulation material having a surface;
- a first conductive contact formed through the layer of insulation material to make an electrical connection with the doped region;
- a second conductive contact formed through the layer of insulation material and the semiconductor structure, the second conductive contact extending from the second surface of the semiconductor structure to the surface of the layer of insulation material;
- a first metal-1 trace formed on the layer of insulation material and the first contact to make an electrical connection with the first contact;
- a second metal-1 trace formed on the layer of insulation material and the second contact to make an electrical connection with the second contact;
- a layer of isolation material formed on the layer of insulation material, the first metal-1 trace, and the second metal-1 trace;
- and
- an edge protector that contacts and covers the side walls, the edge protector being spaced apart from the center point, the edge protector covering a portion of the first surface of the semiconductor structure, and contacting a portion of the second surface of the semiconductor structure.
7 more elements
A semiconductor die comprising:
- a semiconductor structure having a first surface, an opposing second surface, and a plurality of side walls, each side wall being connected to the first and second surfaces, a center point lying on the second surface a distance from a first side wall and the distance from a second opposing sidewall;
- a doped region formed in the first surface of the semiconductor structure;
- a layer of insulation material formed on the first surface of the semiconductor structure, the layer of insulation material having a surface;
- a first conductive contact formed through the layer of insulation material to make an electrical connection with the doped region;
- a second conductive contact formed through the layer of insulation material and the semiconductor structure, the second conductive contact extending from the second surface of the semiconductor structure to the surface of the layer of insulation material;
- a first metal-1 trace formed on the layer of insulation material and the first contact to make an electrical connection with the first contact;
- a second metal-1 trace formed on the layer of insulation material and the second contact to make an electrical connection with the second contact;
- a layer of isolation material formed on the layer of insulation material, the first metal-1 trace, and the second metal-1 trace;
- and
- an edge protector that contacts and covers the side walls, the edge protector being spaced apart from the center point, the edge protector contacting only the side walls.
7 more elements
A semiconductor die comprising:
- a semiconductor structure having a first surface, an opposing second surface, and a plurality of side walls, each side wall being connected to the first and second surfaces, a center point lying on the second surface a distance from a first side wall and the distance from a second opposing sidewall;
- a doped region formed in the first surface of the semiconductor structure;
- a layer of insulation material formed on the first surface of the semiconductor structure, the layer of insulation material having a surface;
- a conductive contact formed through the layer of insulation material to make an electrical connection with the doped region;
- and
- an edge protector that contacts and covers the side walls, the edge protector being spaced apart from the center point, the edge protector contacting only the side walls.
3 more elements
Dependencies are inferred from the claim text.