MEMS device with controlled gas space chemistry
AssigneeTexas Instruments Incorporated
InventorsWalter M. Duncan, Simon Joshua Jacobs, Michael R. Douglass, Richard O. Gale
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Abstract
A process for protecting a MEMS device used in a UV illuminated application from damage due to a photochemical activation between the UV flux and package gas constituents, formed from the out-gassing of various lubricants and passivants put in the device package to prevent sticking of the MEMS device's moving parts. This process coats the exposed surfaces of the MEMS device and package's optical window surfaces with a metal-halide film to eliminate this photochemical activation and therefore significantly extend the reliability and lifetime of the MEMS device.
Claims5
A process for preventing damage to a MEMS device from the reaction caused by the exposure of photo-sensitive package materials to UV illumination, the process comprises:
- forming a MEMS device;
- forming a package having a window;
- and
- coating the exposed surfaces of said MEMS device
- and the inside surface of said package window,
- with a thin or thick metal-halide film.
Dependencies are inferred from the claim text.