Method of manufacturing field-emission electron emitters and method of manufacturing substrates having a matrix electron emitter array formed thereon
AssigneeKabushiki Kaisha Toshiba
InventorKoji Suzuki
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AssigneeKabushiki Kaisha Toshiba
InventorKoji Suzuki
Estimating the term…
In a method of manufacturing matrix electron emitter arrays, each array comprising a plurality of scanning lines formed on a glass substrate and arranged in parallel with each other, a plurality of signal lines formed in a direction to cross the scanning lines and arranged in parallel with each other, and field-emission type electron emitters formed in the pixel areas which are arranged at the intersections of the scanning lines and the signal lines, a pulse voltage with a specific polarity and another pulse voltage with the reverse polarity are applied to any two of the scanning lines and current is caused to flow through electron emitters connected in series-via a signal line, thereby subjecting the conductive thin film constituting an electron emitter to a conductive activation process for forming an electron emitting section.
A method of manufacturing field-emission type electron emitter unit comprising a plurality of field emission type electron emitters connected to each other, each of said electron emitters comprising a pair of electrodes formed on an insulating substrate, a conductive thin film formed between said pair of electrodes, and an electron emitting section configured to emit electrons and formed in said conductive thin film, said method comprising:
A method of manufacturing field-emission type electron emitters, comprising:
A method of manufacturing a matrix electron emitter array substrate comprising an insulating substrate, a plurality of scanning lines which are formed on said insulating substrate to be substantially parallel with each other, a plurality of signal lines which are formed in a direction to cross said scanning lines to be substantially parallel with each other, said signal lines being isolated from said scanning lines, and field emission type electron emitters which are formed in the pixel areas defined by intersections of said scanning lines and said signal lines and which are arranged in a matrix, and each of said field emission type electron emitters comprising a pair of electrodes formed on said insulating substrate, one of said pair of electrodes connected to one of said scanning lines and another of said pair of electrodes connected to one of said signal lines, a conductive thin film formed between said pair of electrodes, and an electron emitting section configured to emit electrons and formed in said conductive thin film, said method comprising:
A method of manufacturing a matrix electron emitter array substrate comprising an insulating substrate, a plurality of row lines which are formed on said insulating substrate to be substantially parallel with each other, a plurality of column lines which are formed on said insulating substrate to be substantially parallel with each other in a direction to cross said row lines, said column lines isolated from said row lines, field emission type electron emitters, each configured to emit electrons, which are formed in pixel areas defined by intersections of said row lines and said column lines, said method comprising:
A method of manufacturing a matrix electron emitter array substrate comprising an insulating substrate, a plurality of scanning lines which are formed on said insulating substrate to be substantially parallel with each other, a plurality of signal lines which are formed in a direction to cross said scanning lines to be substantially parallel with each other, said signal lines being isolated from said scanning lines, and field emission type electron emitters which are formed in the pixel areas defined by intersections of said scanning lines and said signal lines and which are arranged in a matrix, and each of said field emission type electron emitters comprising a pair of electrodes formed on said insulating substrate, one of said pair of electrodes connected to one of said scanning lines and another of said pair of electrodes connected to one of said signal lines, a conductive thin film formed between said pair of electrodes, and an electron emitting section formed in said conductive thin film, said method comprising:
Dependencies are inferred from the claim text.