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US 6,746,818 B2Granted
(Meth)acrylates having lactone structure, polymers, photoresist compositions and patterning process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTakeshi Kinsho, Koji Hasegawa, Takeru Watanabe
Life of this patent
Estimating the term…
Abstract
(Meth)acrylate compounds having a norbornane, bicyclo[2.2.2]octane, 7-oxanorbornane or cyclohexane ring structure and a γ-butyrolactone ring structure connected together by a suitable linker are novel and useful in forming polymers having high transparency, especially at the exposure wavelength of an excimer laser.
Claims20
A (meth)acrylate compound having the following general formula (1):
- wherein R1 is hydrogen or methyl, R2 and R3 each are hydrogen or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, or R2 and R3, taken together, may form a ring and in that event, R2 and R3 together represent a straight, branched or cyclic alkylene group having 2 to 15 carbon atoms, X is —CH2—, —CH2CH2— or —O— or two separate —H, with the proviso that R2 and R3 are not simultaneously hydrogen if X is —CH2, and the broken line represents a single bond or divalent organic group that connects the norbornane ring, bicyclo[2.2.2]octane ring, 7-oxanorbornane ring or cyclohexane ring structure to the γ-butyrolactone ring structure, or a structure that shares one or two constituent carbon atoms between these ring structures.
A (meth)acrylate compound having the following general formula (2):
- wherein R1 is hydrogen or methyl, R2 and R3 each are hydrogen or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, or R2 and R3, taken together, may form a ring and in that event, R2 and R3 together represent a straight, branched or cyclic alkylene group having 2 to 15 carbon atoms, X is —CH2—, —CH2CH2— or —O— or two separate —H, and Y is —(CH2)n— in which at least one methylene group may be replaced by an oxygen atom, and n is an integer of 0 to 6.
A (meth)acrylate compound having the following general formula (3) or (4):
- wherein R1 is hydrogen or methyl, R2 and R3 each are hydrogen or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, or R2 and R3, taken together, may form a ring and in that event, R2 and R3 together represent a straight, branched or cyclic alkylene group having 2 to 15 carbon atoms, and X is —CH2—, —CH2CH2— or —O— or two separate —H.
A (meth)acrylate compound having the following general formula (5):
- wherein R1 is hydrogen or methyl, R2 and R3 each are hydrogen or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, or R2 and R3, taken together, may form a ring and in that event, R2 and R3 together represent a straight, branched or cyclic alkylene group having 2 to 15 carbon atoms, and X is —CH2—, —CH2CH2— or —O— or two separate —H, with the proviso that R2 and R3 are not simultaneously hydrogen if X is —CH2.
A polymer comprising recurring units of the following general formula (6):
- wherein R1 is hydrogen or methyl, R2 and R3 each are hydrogen or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, or R2 and R3, taken together, may form a ring and in that event, R2 and R3 together represent a straight, branched or cyclic alkylene group having 2 to 15 carbon atoms, X is —CH2—, —CH2CH2— or —O— or two separate —H, with the proviso that R2 and R3 are not simultaneously hydrogen if X is —CH2, and the broken line represents a single bond or divalent organic group that connects the norbornane ring, bicyclo[2.2.2]octane ring, 7-oxanorbornane ring or cyclohexane ring structure to the γ-butyrolactone ring structure, or a structure that shares one or two constituent carbon atoms between these ring structures.
A polymer comprising recurring units of the formula:
- wherein R1 is hydrogen or methyl, R2 and R3 each are hydrogen or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, or R2 and R3, taken together, may form a ring and in that event, R2 and R3 together represent a straight, branched or cyclic alkylene group having 2 to 15 carbon atoms, X is —CH2—, —CH2CH2— or —O— or two separate —H, and Y is —(CH2)n— in which at least one methylene group may be replaced by an oxygen atom, and n is an integer of 0 to 6.
A polymer comprising recurring units of at least one of the formulae:
- wherein R1 is hydrogen or methyl, R2 and R3 each are hydrogen or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, or R2 and R3, taken together, may form a ring and in that event, R2 and R3 together represent a straight, branched or cyclic alkylene group having 2 to 15 carbon atoms, and X is —CH2—, —CH2CH2— or —O— or two separate —H.
A (meth)acrylate compound having the formula (1):
- wherein (i) R1 is hydrogen or methyl, (ii) R2 and R3 each are hydrogen or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, or R2 and R3, taken together, form a ring where R2 and R3, together represent a straight, branched or cyclic alkylene group having 2 to 15 carbon atoms, and X is —CH2CH2— or —O— or two separate —H, (iii) R2 is hydrogen or a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, R3 is a straight, branched or cyclic alkyl group having 1 to 15 carbon atoms, or R2 and R3, taken together, form a ring where R2 and R3 together represent a straight, branched or cyclic alkylene group having 2 to 15 carbon atoms, and X is —CH2—, and (iv) the broken line represents a single bond or divalent organic group that connects the norbornane ring, bicyclo[2.2.2] octane ring, 7-oxanorbornane ring or cyclohexane ring structure to the γ-butyrolactone ring structure, or a structure that shares one or two constituent carbon atoms between these ring structures.
Dependencies are inferred from the claim text.