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AssigneeApplied Materials, Inc.
InventorsJohn M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Shinichi Kurita, Wendell T. Blonigan, David E. Berkstresser
Estimating the term…
The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber.
A substrate transfer shuttle for carrying a substrate in a processing system having at least two chambers, comprising:
A substrate transfer shuttle for carrying a substrate in a processing system having at least two chambers, comprising:
A substrate transfer shuttle for carrying a substrate in a processing system having at least two chambers, comprising:
Dependencies are inferred from the claim text.