US 6,746,197 B2Granted

Substrate processing apparatus and substrate processing method

AssigneeTokyo Electron Limited

InventorsYoshio Kimura, Issei Ueda, Mitiaki Matsushita, Kazuhiko Ito

Life of this patent

Estimating the term…

Loading patent…

Abstract

A substrate processing apparatus comprises a processing section for performing processing for a substrate, a substrate carrier transfer section into/out of which a substrate carrier holding a plurality of substrates is carried, and a substrate transfer mechanism for taking an unprocessed substrate out of the substrate carrier carried into the substrate carrier transfer section to deliver it to the processing section and for receiving a processed substrate from the processing section to deliver it into the substrate carrier placed on the substrate carrier transfer section. The substrate carrier transfer section shifts the position of the substrate carrier between a first position at which the substrate carrier is carried to/from the outside and a second position at which the substrate in the substrate carrier is delivered to/from the substrate transfer mechanism.

Claims6

Dependent claims

A substrate processing apparatus comprising:

a processing unit that performs a process on a substrate;
a carrier stage for delivering and receiving a substrate carrier to and from an external carrier conveyer, the carrier stage being configured to support the substrate carrier thereon at a first level with the substrate being horizontally accommodated in the substrate carrier;
a carrier container having a plurality of shelves arranged in a vertical direction, each of the shelves being adapted to support the substrate carrier thereon while the substrate is horizontally accommodated in the substrate carrier;
a container elevating mechanism adapted to vertically move the carrier container in order to locate the substrate carrier supported on any one of the shelves at the first level;
a substrate transfer arm that horizontally removes a substrate, which is to be processed in the processing unit, from the substrate carrier located at the first level in the carrier container, and that horizontally inserts a processed substrate, which has been processed in the processing unit, into the substrate carrier located at the first level in the carrier container;
and
a carrier transfer mechanism adapted to horizontally move the substrate carrier located on one of the shelves at the first level to the carrier stage and vise versa without changing an attitude of the substrate carrier.

4 more elements

A substrate processing apparatus comprising:

a processing unit that performs a process on a substrate;
a plurality of carrier stages each for delivering and receiving a substrate carrier to and from an external carrier conveyer, the carrier stages being arranged in a row in a first horizontal direction, and each of the carrier stages being configured to support the substrate carrier thereon at a first level with the substrate being horizontally accommodated in the substrate carrier;
a plurality of carrier containers arranged in correspondence to the carrier stages and aligned in a row in the first horizontal direction, each of the carrier containers having a plurality of shelves arranged in a vertical direction, each of the shelves being adapted to support the substrate carrier thereon with the substrate being horizontally accommodated in the substrate carrier, and each of the carrier containers being provided with a container elevating mechanism adapted to vertically move the carrier container in order to locate the substrate carrier supported on any one of the shelves at the first level;
carrier transfer mechanisms each adapted to move, in a second horizontal direction perpendicular to the first horizontal direction, the substrate carrier located on one of the shelves of each of the carrier containers at the first level to the corresponding carrier stage and vise versa without changing an attitude of the substrate carrier;
and
a substrate transfer arm adapted to move in the first and second horizontal directions to access the substrate carrier located at the first level in each of the carrier containers in order for the substrate transfer arm to horizontally remove the substrate, which is to be processed in the processing unit, from the substrate carrier located at the first level in one of the carrier containers, and to insert a processed substrate, which has been processed in the processing unit, into the substrate carrier located in one of the carrier containers at the first level.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application: 10/202,090Filed 25 Jul 2002 · continuation
Priority: JP 10-28606222 Sep 1998
Published: US 2002/0182040 A15 Dec 2002
Granted: 8 Jun 2004
Term ends: Not estimatedThe source records don’t support an estimate.

Classification8 codes

H10P 72/3411
The wafers being stored in a carrier, involving loading and unloading: involving loading and unloading of wafers
H10P 72/3404
The wafers being stored in a carrier, involving loading and unloading: storage means
H10P 72/3406
The wafers being stored in a carrier, involving loading and unloading: involving removal of lid, door or cover
Y10S 414/137
Associated with semiconductor wafer handling: including means for charging or discharging wafer cassette