Semiconductor transfer and manufacturing apparatus
AssigneeFujitsu Limited
InventorHidenobu Shirai
Life of this patent
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Abstract
A transfer apparatus has a transfer robot for transferring wafers between a process chamber and a pre-pressurizing chamber. The process chamber and pre-pressurizing chamber are arranged in a circle. The transfer robot has multiple arms, arranged hierarchically, for transferring the wafers. The arms are rotatable along the circle and vertically movable.
Claims19
A transfer apparatus for transferring a plurality of workpieces, comprising:
- a plurality of chambers arranged on a predetermined imaginary circle;
- and
- a transfer robot having a plurality of arms arranged hierarchically for respectively supporting the plurality of workpieces, the plurality of arms being independently rotatable along the imaginary circle and moveable upward and downward for transferring the plurality of workpieces between the plurality of chambers.
The transfer apparatus according to clam 1, wherein at least one of the chambers provides the associated workpiece to the associated arm from below the associated arm.
A workpiece processing apparatus for comprising:
- a transfer robot having a plurality of arms arranged hierarchically to hold a plurality of workpieces, the plurality of arms being independently rotatable and independently moveable upward and downward;
- a process chamber, arranged on a rotational locus of the plurality of arms, for performing a predetermined process on at least one workpiece;
- a pre-pressurizing chamber, arranged on the rotational locus of the plurality of arms, having a pressure changeable between an external pressure of the processing apparatus and an internal pressure of the processing apparatus;
- and
- a transfer chamber connecting the process chamber to the pre-pressurizing chamber,
- wherein the transfer robot transfers the plurality of workpieces between the process chamber, the pre-pressurizing chamber, and the transfer chamber.
Dependencies are inferred from the claim text.