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US 6,746,106 B1Granted
Fluid ejection device
AssigneeHewlett-Packard Development Company, L.P.
InventorMichael B. Hager
Life of this patent
Estimating the term…
Abstract
Fluid ejection device includes a substrate having a top surface and a bottom surface. A plurality of fluid drop generators are formed on the top surface of the substrate along a shelf region, each including a firing chamber. A fluid feed slot structure is defined in the substrate, and has a side wall. A plurality of features formed in the side wall creates at least one diverging channel directed away from the shelf region.
Claims25
A fluid ejection device, comprising:
- a substrate having a top surface and a bottom surface;
- a plurality of fluid drop generators formed on the top surface of the substrate along a shelf region, each including a firing chamber;
- a top-side trench formed in the substrate on said top surface, the trench having a trench floor end a peripheral trench side wall formed in the substrate adjacent the shelf region;
- a fluid feed slot structure defined in the substrate between the trench floor and the bottom surface;
- and
- a plurality of features formed in the trench side wall which create at least one diverging channel directed away from the shelf region.
3 more elements
A fluid ejection device, comprising:
- a substrate having a top surface and a bottom surface;
- a plurality of thin film layers formed on the top surface of the substrate, at least one of said layers forming a plurality of fluid ejection elements;
- a barrier/orifice structure formed over said thin film layers, said structure defining a plurality of fluid ejection chambers, said barrier/orifice structure further defining a nozzle for each fluid ejection chamber;
- a top-side trench formed on said top surface, the trench having a trench floor and a peripheral trench side wall formed in the substrate adjacent a top surface shelf region adjacent said fluid election elements;
- a fluid feed slot structure defined in the substrate between the trench floor and the bottom surface;
- and
- a plurality of tapered slot features formed in the trench side wall which create at least one diverging channel directed away from the shelf region.
4 more elements
An inkjet printhead, comprising:
- a substantially planar substrate having a top surface and a bottom surface;
- a thin film structure formed on the top surface and defining a plurality of ink drop generators, each including a firing chamber;
- a trench formed in the top surface, the trench having a trench wall and a trench surface recessed below the top surface of the substrate;
- an ink feed slot defined in the substrate between the trench surface and the bottom surface;
- and
- a tapered slot feature formed in the trench wall to create at least one diverging channel directed away from the trench wall.
3 more elements
An inkjet printhead, comprising:
- a substrate having a top surface and a bottom surface;
- a plurality of thin film layers formed on the top surface of the substrate, at least one of said layers forming a plurality of ink drop generator elements adjacent a shelf region;
- a barrier/orifice structure formed over said thin film layers, said structure defining a plurality of ink ejection chambers, said barrier/orifice structure further defining a nozzle for each chamber;
- a top-side trench formed in the top surface, the trench having a trench floor and a peripheral trench side wall formed in the substrate adjacent the shelf region;
- a fluid feed slot structure defined in the substrate between the trench floor and the bottom surface to allow ink flow from an ink reservoir in fluid communication with the bottom surface;
- and
- a plurality of tapered slot features formed in the trench side wall which create one or more diverging channels directed away from the shelf region.
4 more elements
A method of fabricating a substrate for a fluid ejection device, comprising:
- forming a mask over a top surface of the substrate defining a trench perimeter, the mask including a plurality of mask protrusions substantially along an edge of the trench perimeter, wherein the protrusions protrude toward a center of the mask;
- etching a trench in the substrate through the mask, the trench having a trench floor and a trench side wall;
- forming slot features in the trench side wall to create a diverging channel directed away from a shelf region defined by the mask protrusions;
- and
- forming one or more slots in the substrate between the trench floor and a bottom surface of the substrate.
2 more elements
Dependencies are inferred from the claim text.